11/13/2010	11:34:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	11:34:18 AM	Recipe started at 11:34 AM
11/13/2010	11:34:18 AM	H2 valve closed
11/13/2010	11:34:18 AM	BCl3 valve closed
11/13/2010	11:34:18 AM	PH3 valve closed
11/13/2010	11:34:18 AM	SiCl4 pre valve closed
11/13/2010	11:34:18 AM	SiCl4 post valve closed
11/13/2010	11:34:18 AM	Main Vac valve closed
11/13/2010	11:34:18 AM	Bypass valve closed
11/13/2010	11:34:18 AM	Bubbler valve closed
11/13/2010	11:34:18 AM	Helium valve opened
11/13/2010	11:34:18 AM	Helium MFC set to  500.000000
11/13/2010	11:34:18 AM	H2 MFC set to  0.000000
11/13/2010	11:34:18 AM	BCl3 MFC set to  0.000000
11/13/2010	11:34:18 AM	PHl3 MFC set to  0.000000
11/13/2010	11:34:18 AM	SiCl4 MFC set to  0.000000
11/13/2010	11:34:18 AM	Bypass solenoid MFC set to  0.000000
11/13/2010	11:34:18 AM	Tube furnace set to 0
11/13/2010	11:34:26 AM	Run aborted at 11:34 AM
11/13/2010	11:34:26 AM	Helium valve closed
11/13/2010	11:34:26 AM	H2 valve closed
11/13/2010	11:34:26 AM	BCl3 valve closed
11/13/2010	11:34:26 AM	PH3 valve closed
11/13/2010	11:34:26 AM	SiCl4 pre valve closed
11/13/2010	11:34:26 AM	SiCl4 post valve closed
11/13/2010	11:34:26 AM	Bypass valve closed
11/13/2010	11:34:26 AM	Main Vac valve closed
11/13/2010	11:34:26 AM	Bubbler valve closed
11/13/2010	11:34:26 AM	Helium MFC set to  0.000000
11/13/2010	11:34:26 AM	H2 MFC set to  0.000000
11/13/2010	11:34:26 AM	BCl3 MFC set to  0.000000
11/13/2010	11:34:26 AM	PHl3 MFC set to  0.000000
11/13/2010	11:34:26 AM	SiCl4 MFC set to  0.000000
11/13/2010	11:34:26 AM	Tube furnace set to 0
11/13/2010	11:34:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	11:34:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	11:34:33 AM	Recipe started at 11:34 AM
11/13/2010	11:34:33 AM	H2 valve closed
11/13/2010	11:34:33 AM	BCl3 valve closed
11/13/2010	11:34:33 AM	PH3 valve closed
11/13/2010	11:34:33 AM	SiCl4 pre valve closed
11/13/2010	11:34:33 AM	SiCl4 post valve closed
11/13/2010	11:34:33 AM	Main Vac valve closed
11/13/2010	11:34:33 AM	Bypass valve closed
11/13/2010	11:34:33 AM	Bubbler valve closed
11/13/2010	11:34:33 AM	Helium valve opened
11/13/2010	11:34:33 AM	Helium MFC set to  500.000000
11/13/2010	11:34:33 AM	H2 MFC set to  0.000000
11/13/2010	11:34:33 AM	BCl3 MFC set to  0.000000
11/13/2010	11:34:33 AM	PHl3 MFC set to  0.000000
11/13/2010	11:34:33 AM	SiCl4 MFC set to  0.000000
11/13/2010	11:34:33 AM	Bypass solenoid MFC set to  0.000000
11/13/2010	11:34:33 AM	Tube furnace set to 0
11/13/2010	11:35:11 AM	Run aborted at 11:35 AM
11/13/2010	11:35:11 AM	Helium valve closed
11/13/2010	11:35:11 AM	H2 valve closed
11/13/2010	11:35:11 AM	BCl3 valve closed
11/13/2010	11:35:11 AM	PH3 valve closed
11/13/2010	11:35:11 AM	SiCl4 pre valve closed
11/13/2010	11:35:11 AM	SiCl4 post valve closed
11/13/2010	11:35:11 AM	Bypass valve closed
11/13/2010	11:35:11 AM	Main Vac valve closed
11/13/2010	11:35:11 AM	Bubbler valve closed
11/13/2010	11:35:11 AM	Helium MFC set to  0.000000
11/13/2010	11:35:11 AM	H2 MFC set to  0.000000
11/13/2010	11:35:11 AM	BCl3 MFC set to  0.000000
11/13/2010	11:35:11 AM	PHl3 MFC set to  0.000000
11/13/2010	11:35:11 AM	SiCl4 MFC set to  0.000000
11/13/2010	11:35:11 AM	Tube furnace set to 0
11/13/2010	11:35:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	11:35:12 AM	Helium valve opened
11/13/2010	11:35:12 AM	Helium valve closed
11/13/2010	11:35:13 AM	Helium valve opened
11/13/2010	11:35:13 AM	Helium valve closed
11/13/2010	11:35:14 AM	Helium valve opened
11/13/2010	11:35:15 AM	Helium valve closed
11/13/2010	11:47:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	11:47:56 AM	Recipe started at 11:47 AM
11/13/2010	11:47:56 AM	H2 valve closed
11/13/2010	11:47:56 AM	BCl3 valve closed
11/13/2010	11:47:56 AM	PH3 valve closed
11/13/2010	11:47:56 AM	SiCl4 pre valve closed
11/13/2010	11:47:56 AM	SiCl4 post valve closed
11/13/2010	11:47:56 AM	Main Vac valve closed
11/13/2010	11:47:56 AM	Bypass valve closed
11/13/2010	11:47:56 AM	Bubbler valve closed
11/13/2010	11:47:56 AM	Helium valve opened
11/13/2010	11:47:56 AM	Helium MFC set to  500.000000
11/13/2010	11:47:56 AM	H2 MFC set to  0.000000
11/13/2010	11:47:56 AM	BCl3 MFC set to  0.000000
11/13/2010	11:47:56 AM	PHl3 MFC set to  0.000000
11/13/2010	11:47:56 AM	SiCl4 MFC set to  0.000000
11/13/2010	11:47:56 AM	Bypass solenoid MFC set to  0.000000
11/13/2010	11:47:57 AM	Tube furnace set to 0
11/13/2010	11:49:16 AM	Helium valve closed
11/13/2010	11:49:16 AM	H2 valve closed
11/13/2010	11:49:16 AM	BCl3 valve closed
11/13/2010	11:49:16 AM	PH3 valve closed
11/13/2010	11:49:16 AM	SiCl4 pre valve closed
11/13/2010	11:49:16 AM	SiCl4 post valve closed
11/13/2010	11:49:16 AM	Main Vac valve closed
11/13/2010	11:49:16 AM	Bypass valve closed
11/13/2010	11:49:16 AM	Bubbler valve closed
11/13/2010	11:49:16 AM	Helium MFC set to  0.000000
11/13/2010	11:49:16 AM	H2 MFC set to  0.000000
11/13/2010	11:49:16 AM	BCl3 MFC set to  0.000000
11/13/2010	11:49:16 AM	PHl3 MFC set to  0.000000
11/13/2010	11:49:16 AM	SiCl4 MFC set to  0.000000
11/13/2010	11:49:16 AM	Bypass solenoid MFC set to  0.000000
11/13/2010	11:49:16 AM	Tube furnace set to 0
11/13/2010	11:49:17 AM	Run finished at 11:49 AM
11/13/2010	11:49:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	12:22:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	12:22:06 PM	Recipe started at 12:22 PM
11/13/2010	12:22:06 PM	Helium valve closed
11/13/2010	12:22:06 PM	H2 valve closed
11/13/2010	12:22:06 PM	BCl3 valve closed
11/13/2010	12:22:06 PM	PH3 valve closed
11/13/2010	12:22:06 PM	SiCl4 pre valve closed
11/13/2010	12:22:06 PM	SiCl4 post valve closed
11/13/2010	12:22:06 PM	Main Vac valve closed
11/13/2010	12:22:06 PM	Bubbler valve closed
11/13/2010	12:22:06 PM	Bypass valve opened
11/13/2010	12:22:06 PM	Helium MFC set to  0.000000
11/13/2010	12:22:06 PM	H2 MFC set to  0.000000
11/13/2010	12:22:06 PM	BCl3 MFC set to  0.000000
11/13/2010	12:22:06 PM	PHl3 MFC set to  0.000000
11/13/2010	12:22:06 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:22:06 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:22:06 PM	Tube furnace set to 0
11/13/2010	12:22:57 PM	Helium valve closed
11/13/2010	12:22:57 PM	H2 valve closed
11/13/2010	12:22:57 PM	BCl3 valve closed
11/13/2010	12:22:57 PM	PH3 valve closed
11/13/2010	12:22:57 PM	SiCl4 pre valve closed
11/13/2010	12:22:57 PM	SiCl4 post valve closed
11/13/2010	12:22:57 PM	Bubbler valve closed
11/13/2010	12:22:57 PM	Main Vac valve opened
11/13/2010	12:22:57 PM	Bypass valve opened
11/13/2010	12:22:57 PM	Helium MFC set to  0.000000
11/13/2010	12:22:57 PM	H2 MFC set to  0.000000
11/13/2010	12:22:57 PM	BCl3 MFC set to  0.000000
11/13/2010	12:22:57 PM	PHl3 MFC set to  0.000000
11/13/2010	12:22:57 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:22:57 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:22:57 PM	Tube furnace set to 0
11/13/2010	12:22:57 PM	Run finished at 12:22 PM
11/13/2010	12:22:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	12:27:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/13/2010	12:27:35 PM	Recipe started at 12:27 PM
11/13/2010	12:27:35 PM	Helium valve closed
11/13/2010	12:27:35 PM	H2 valve closed
11/13/2010	12:27:35 PM	BCl3 valve closed
11/13/2010	12:27:35 PM	PH3 valve closed
11/13/2010	12:27:35 PM	SiCl4 pre valve closed
11/13/2010	12:27:35 PM	SiCl4 post valve closed
11/13/2010	12:27:35 PM	Main Vac valve closed
11/13/2010	12:27:35 PM	Bubbler valve closed
11/13/2010	12:27:35 PM	Bypass valve opened
11/13/2010	12:27:35 PM	Helium MFC set to  0.000000
11/13/2010	12:27:35 PM	H2 MFC set to  0.000000
11/13/2010	12:27:35 PM	BCl3 MFC set to  0.000000
11/13/2010	12:27:35 PM	PHl3 MFC set to  0.000000
11/13/2010	12:27:35 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:27:35 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:27:35 PM	Tube furnace set to 0
11/13/2010	12:27:35 PM	Helium valve closed
11/13/2010	12:27:35 PM	H2 valve closed
11/13/2010	12:27:35 PM	BCl3 valve closed
11/13/2010	12:27:35 PM	PH3 valve closed
11/13/2010	12:27:35 PM	SiCl4 pre valve closed
11/13/2010	12:27:35 PM	SiCl4 post valve closed
11/13/2010	12:27:35 PM	Bubbler valve closed
11/13/2010	12:27:35 PM	Main Vac valve opened
11/13/2010	12:27:35 PM	Bypass valve opened
11/13/2010	12:27:35 PM	Helium MFC set to  0.000000
11/13/2010	12:27:35 PM	H2 MFC set to  0.000000
11/13/2010	12:27:35 PM	BCl3 MFC set to  0.000000
11/13/2010	12:27:35 PM	PHl3 MFC set to  0.000000
11/13/2010	12:27:35 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:27:35 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:27:35 PM	Tube furnace set to 0
11/13/2010	12:28:35 PM	H2 valve closed
11/13/2010	12:28:35 PM	BCl3 valve closed
11/13/2010	12:28:35 PM	PH3 valve closed
11/13/2010	12:28:35 PM	SiCl4 pre valve closed
11/13/2010	12:28:35 PM	SiCl4 post valve closed
11/13/2010	12:28:35 PM	Bubbler valve closed
11/13/2010	12:28:35 PM	Helium valve opened
11/13/2010	12:28:35 PM	Main Vac valve opened
11/13/2010	12:28:35 PM	Bypass valve opened
11/13/2010	12:28:35 PM	Helium MFC set to  100.000000
11/13/2010	12:28:35 PM	H2 MFC set to  0.000000
11/13/2010	12:28:35 PM	BCl3 MFC set to  0.000000
11/13/2010	12:28:35 PM	PHl3 MFC set to  0.000000
11/13/2010	12:28:35 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:28:35 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:28:36 PM	Tube furnace set to 0
11/13/2010	12:29:36 PM	Helium valve closed
11/13/2010	12:29:36 PM	H2 valve closed
11/13/2010	12:29:36 PM	BCl3 valve closed
11/13/2010	12:29:36 PM	PH3 valve closed
11/13/2010	12:29:36 PM	SiCl4 pre valve closed
11/13/2010	12:29:36 PM	SiCl4 post valve closed
11/13/2010	12:29:36 PM	Bubbler valve closed
11/13/2010	12:29:36 PM	Main Vac valve opened
11/13/2010	12:29:36 PM	Bypass valve opened
11/13/2010	12:29:36 PM	Helium MFC set to  0.000000
11/13/2010	12:29:36 PM	H2 MFC set to  0.000000
11/13/2010	12:29:36 PM	BCl3 MFC set to  0.000000
11/13/2010	12:29:36 PM	PHl3 MFC set to  0.000000
11/13/2010	12:29:36 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:29:36 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:29:36 PM	Tube furnace set to 0
11/13/2010	12:30:36 PM	H2 valve closed
11/13/2010	12:30:36 PM	BCl3 valve closed
11/13/2010	12:30:36 PM	PH3 valve closed
11/13/2010	12:30:36 PM	SiCl4 pre valve closed
11/13/2010	12:30:36 PM	SiCl4 post valve closed
11/13/2010	12:30:36 PM	Bubbler valve closed
11/13/2010	12:30:36 PM	Helium valve opened
11/13/2010	12:30:36 PM	Main Vac valve opened
11/13/2010	12:30:36 PM	Bypass valve opened
11/13/2010	12:30:36 PM	Helium MFC set to  100.000000
11/13/2010	12:30:36 PM	H2 MFC set to  0.000000
11/13/2010	12:30:36 PM	BCl3 MFC set to  0.000000
11/13/2010	12:30:36 PM	PHl3 MFC set to  0.000000
11/13/2010	12:30:36 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:30:36 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:30:36 PM	Tube furnace set to 0
11/13/2010	12:31:36 PM	Helium valve closed
11/13/2010	12:31:36 PM	H2 valve closed
11/13/2010	12:31:36 PM	BCl3 valve closed
11/13/2010	12:31:36 PM	PH3 valve closed
11/13/2010	12:31:36 PM	SiCl4 pre valve closed
11/13/2010	12:31:36 PM	SiCl4 post valve closed
11/13/2010	12:31:36 PM	Bubbler valve closed
11/13/2010	12:31:36 PM	Main Vac valve opened
11/13/2010	12:31:36 PM	Bypass valve opened
11/13/2010	12:31:36 PM	Helium MFC set to  0.000000
11/13/2010	12:31:36 PM	H2 MFC set to  0.000000
11/13/2010	12:31:36 PM	BCl3 MFC set to  0.000000
11/13/2010	12:31:36 PM	PHl3 MFC set to  0.000000
11/13/2010	12:31:36 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:31:36 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:31:36 PM	Tube furnace set to 0
11/13/2010	12:32:36 PM	H2 valve closed
11/13/2010	12:32:36 PM	BCl3 valve closed
11/13/2010	12:32:36 PM	PH3 valve closed
11/13/2010	12:32:36 PM	SiCl4 pre valve closed
11/13/2010	12:32:36 PM	SiCl4 post valve closed
11/13/2010	12:32:36 PM	Bubbler valve closed
11/13/2010	12:32:36 PM	Helium valve opened
11/13/2010	12:32:36 PM	Main Vac valve opened
11/13/2010	12:32:36 PM	Bypass valve opened
11/13/2010	12:32:36 PM	Helium MFC set to  100.000000
11/13/2010	12:32:36 PM	H2 MFC set to  0.000000
11/13/2010	12:32:36 PM	BCl3 MFC set to  0.000000
11/13/2010	12:32:36 PM	PHl3 MFC set to  0.000000
11/13/2010	12:32:36 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:32:36 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:32:36 PM	Tube furnace set to 0
11/13/2010	12:33:36 PM	Helium valve closed
11/13/2010	12:33:36 PM	H2 valve closed
11/13/2010	12:33:36 PM	BCl3 valve closed
11/13/2010	12:33:36 PM	PH3 valve closed
11/13/2010	12:33:36 PM	SiCl4 pre valve closed
11/13/2010	12:33:36 PM	SiCl4 post valve closed
11/13/2010	12:33:36 PM	Bubbler valve closed
11/13/2010	12:33:36 PM	Main Vac valve opened
11/13/2010	12:33:36 PM	Bypass valve opened
11/13/2010	12:33:36 PM	Helium MFC set to  0.000000
11/13/2010	12:33:36 PM	H2 MFC set to  0.000000
11/13/2010	12:33:36 PM	BCl3 MFC set to  0.000000
11/13/2010	12:33:36 PM	PHl3 MFC set to  0.000000
11/13/2010	12:33:36 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:33:36 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:33:37 PM	Tube furnace set to 0
11/13/2010	12:34:37 PM	H2 valve closed
11/13/2010	12:34:37 PM	BCl3 valve closed
11/13/2010	12:34:37 PM	PH3 valve closed
11/13/2010	12:34:37 PM	SiCl4 pre valve closed
11/13/2010	12:34:37 PM	SiCl4 post valve closed
11/13/2010	12:34:37 PM	Bubbler valve closed
11/13/2010	12:34:37 PM	Helium valve opened
11/13/2010	12:34:37 PM	Main Vac valve opened
11/13/2010	12:34:37 PM	Bypass valve opened
11/13/2010	12:34:37 PM	Helium MFC set to  100.000000
11/13/2010	12:34:37 PM	H2 MFC set to  0.000000
11/13/2010	12:34:37 PM	BCl3 MFC set to  0.000000
11/13/2010	12:34:37 PM	PHl3 MFC set to  0.000000
11/13/2010	12:34:37 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:34:37 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:34:37 PM	Tube furnace set to 0
11/13/2010	12:35:37 PM	Helium valve closed
11/13/2010	12:35:37 PM	H2 valve closed
11/13/2010	12:35:37 PM	BCl3 valve closed
11/13/2010	12:35:37 PM	PH3 valve closed
11/13/2010	12:35:37 PM	SiCl4 pre valve closed
11/13/2010	12:35:37 PM	SiCl4 post valve closed
11/13/2010	12:35:37 PM	Bubbler valve closed
11/13/2010	12:35:37 PM	Main Vac valve opened
11/13/2010	12:35:37 PM	Bypass valve opened
11/13/2010	12:35:37 PM	Helium MFC set to  0.000000
11/13/2010	12:35:37 PM	H2 MFC set to  0.000000
11/13/2010	12:35:37 PM	BCl3 MFC set to  0.000000
11/13/2010	12:35:37 PM	PHl3 MFC set to  0.000000
11/13/2010	12:35:37 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:35:37 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:35:37 PM	Tube furnace set to 0
11/13/2010	12:36:37 PM	H2 valve closed
11/13/2010	12:36:37 PM	BCl3 valve closed
11/13/2010	12:36:37 PM	PH3 valve closed
11/13/2010	12:36:37 PM	SiCl4 pre valve closed
11/13/2010	12:36:37 PM	SiCl4 post valve closed
11/13/2010	12:36:37 PM	Bubbler valve closed
11/13/2010	12:36:37 PM	Helium valve opened
11/13/2010	12:36:37 PM	Main Vac valve opened
11/13/2010	12:36:37 PM	Bypass valve opened
11/13/2010	12:36:37 PM	Helium MFC set to  100.000000
11/13/2010	12:36:37 PM	H2 MFC set to  0.000000
11/13/2010	12:36:37 PM	BCl3 MFC set to  0.000000
11/13/2010	12:36:37 PM	PHl3 MFC set to  0.000000
11/13/2010	12:36:37 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:36:37 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:36:37 PM	Tube furnace set to 0
11/13/2010	12:37:37 PM	Helium valve closed
11/13/2010	12:37:37 PM	H2 valve closed
11/13/2010	12:37:37 PM	BCl3 valve closed
11/13/2010	12:37:37 PM	PH3 valve closed
11/13/2010	12:37:37 PM	SiCl4 pre valve closed
11/13/2010	12:37:37 PM	SiCl4 post valve closed
11/13/2010	12:37:37 PM	Bubbler valve closed
11/13/2010	12:37:37 PM	Main Vac valve opened
11/13/2010	12:37:37 PM	Bypass valve opened
11/13/2010	12:37:37 PM	Helium MFC set to  0.000000
11/13/2010	12:37:37 PM	H2 MFC set to  0.000000
11/13/2010	12:37:37 PM	BCl3 MFC set to  0.000000
11/13/2010	12:37:37 PM	PHl3 MFC set to  0.000000
11/13/2010	12:37:37 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:37:37 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:37:37 PM	Tube furnace set to 0
11/13/2010	12:38:37 PM	H2 valve closed
11/13/2010	12:38:37 PM	BCl3 valve closed
11/13/2010	12:38:37 PM	PH3 valve closed
11/13/2010	12:38:37 PM	SiCl4 pre valve closed
11/13/2010	12:38:37 PM	SiCl4 post valve closed
11/13/2010	12:38:37 PM	Bubbler valve closed
11/13/2010	12:38:37 PM	Helium valve opened
11/13/2010	12:38:37 PM	Main Vac valve opened
11/13/2010	12:38:37 PM	Bypass valve opened
11/13/2010	12:38:37 PM	Helium MFC set to  100.000000
11/13/2010	12:38:37 PM	H2 MFC set to  0.000000
11/13/2010	12:38:37 PM	BCl3 MFC set to  0.000000
11/13/2010	12:38:37 PM	PHl3 MFC set to  0.000000
11/13/2010	12:38:37 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:38:37 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:38:38 PM	Tube furnace set to 0
11/13/2010	12:39:38 PM	Helium valve closed
11/13/2010	12:39:38 PM	H2 valve closed
11/13/2010	12:39:38 PM	BCl3 valve closed
11/13/2010	12:39:38 PM	PH3 valve closed
11/13/2010	12:39:38 PM	SiCl4 pre valve closed
11/13/2010	12:39:38 PM	SiCl4 post valve closed
11/13/2010	12:39:38 PM	Bubbler valve closed
11/13/2010	12:39:38 PM	Main Vac valve opened
11/13/2010	12:39:38 PM	Bypass valve opened
11/13/2010	12:39:38 PM	Helium MFC set to  0.000000
11/13/2010	12:39:38 PM	H2 MFC set to  0.000000
11/13/2010	12:39:38 PM	BCl3 MFC set to  0.000000
11/13/2010	12:39:38 PM	PHl3 MFC set to  0.000000
11/13/2010	12:39:38 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:39:38 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:39:38 PM	Tube furnace set to 0
11/13/2010	12:40:38 PM	H2 valve closed
11/13/2010	12:40:38 PM	BCl3 valve closed
11/13/2010	12:40:38 PM	PH3 valve closed
11/13/2010	12:40:38 PM	SiCl4 pre valve closed
11/13/2010	12:40:38 PM	SiCl4 post valve closed
11/13/2010	12:40:38 PM	Bubbler valve closed
11/13/2010	12:40:38 PM	Helium valve opened
11/13/2010	12:40:38 PM	Main Vac valve opened
11/13/2010	12:40:38 PM	Bypass valve opened
11/13/2010	12:40:38 PM	Helium MFC set to  100.000000
11/13/2010	12:40:38 PM	H2 MFC set to  0.000000
11/13/2010	12:40:38 PM	BCl3 MFC set to  0.000000
11/13/2010	12:40:38 PM	PHl3 MFC set to  0.000000
11/13/2010	12:40:38 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:40:38 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:40:38 PM	Tube furnace set to 0
11/13/2010	12:41:38 PM	Helium valve closed
11/13/2010	12:41:38 PM	H2 valve closed
11/13/2010	12:41:38 PM	BCl3 valve closed
11/13/2010	12:41:38 PM	PH3 valve closed
11/13/2010	12:41:38 PM	SiCl4 pre valve closed
11/13/2010	12:41:38 PM	SiCl4 post valve closed
11/13/2010	12:41:38 PM	Bubbler valve closed
11/13/2010	12:41:38 PM	Main Vac valve opened
11/13/2010	12:41:38 PM	Bypass valve opened
11/13/2010	12:41:38 PM	Helium MFC set to  0.000000
11/13/2010	12:41:38 PM	H2 MFC set to  0.000000
11/13/2010	12:41:38 PM	BCl3 MFC set to  0.000000
11/13/2010	12:41:38 PM	PHl3 MFC set to  0.000000
11/13/2010	12:41:38 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:41:38 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:41:38 PM	Tube furnace set to 0
11/13/2010	12:42:38 PM	H2 valve closed
11/13/2010	12:42:38 PM	BCl3 valve closed
11/13/2010	12:42:38 PM	PH3 valve closed
11/13/2010	12:42:38 PM	SiCl4 pre valve closed
11/13/2010	12:42:38 PM	SiCl4 post valve closed
11/13/2010	12:42:38 PM	Bubbler valve closed
11/13/2010	12:42:38 PM	Helium valve opened
11/13/2010	12:42:38 PM	Main Vac valve opened
11/13/2010	12:42:38 PM	Bypass valve opened
11/13/2010	12:42:38 PM	Helium MFC set to  100.000000
11/13/2010	12:42:38 PM	H2 MFC set to  0.000000
11/13/2010	12:42:38 PM	BCl3 MFC set to  0.000000
11/13/2010	12:42:38 PM	PHl3 MFC set to  0.000000
11/13/2010	12:42:38 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:42:38 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:42:38 PM	Tube furnace set to 0
11/13/2010	12:43:38 PM	Helium valve closed
11/13/2010	12:43:38 PM	H2 valve closed
11/13/2010	12:43:38 PM	BCl3 valve closed
11/13/2010	12:43:38 PM	PH3 valve closed
11/13/2010	12:43:38 PM	SiCl4 pre valve closed
11/13/2010	12:43:38 PM	SiCl4 post valve closed
11/13/2010	12:43:38 PM	Bubbler valve closed
11/13/2010	12:43:38 PM	Main Vac valve opened
11/13/2010	12:43:38 PM	Bypass valve opened
11/13/2010	12:43:38 PM	Helium MFC set to  0.000000
11/13/2010	12:43:38 PM	H2 MFC set to  0.000000
11/13/2010	12:43:38 PM	BCl3 MFC set to  0.000000
11/13/2010	12:43:38 PM	PHl3 MFC set to  0.000000
11/13/2010	12:43:38 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:43:38 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:43:39 PM	Tube furnace set to 0
11/13/2010	12:44:39 PM	H2 valve closed
11/13/2010	12:44:39 PM	BCl3 valve closed
11/13/2010	12:44:39 PM	PH3 valve closed
11/13/2010	12:44:39 PM	SiCl4 pre valve closed
11/13/2010	12:44:39 PM	SiCl4 post valve closed
11/13/2010	12:44:39 PM	Bubbler valve closed
11/13/2010	12:44:39 PM	Helium valve opened
11/13/2010	12:44:39 PM	Main Vac valve opened
11/13/2010	12:44:39 PM	Bypass valve opened
11/13/2010	12:44:39 PM	Helium MFC set to  100.000000
11/13/2010	12:44:39 PM	H2 MFC set to  0.000000
11/13/2010	12:44:39 PM	BCl3 MFC set to  0.000000
11/13/2010	12:44:39 PM	PHl3 MFC set to  0.000000
11/13/2010	12:44:39 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:44:39 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:44:39 PM	Tube furnace set to 0
11/13/2010	12:45:39 PM	Helium valve closed
11/13/2010	12:45:39 PM	H2 valve closed
11/13/2010	12:45:39 PM	BCl3 valve closed
11/13/2010	12:45:39 PM	PH3 valve closed
11/13/2010	12:45:39 PM	SiCl4 pre valve closed
11/13/2010	12:45:39 PM	SiCl4 post valve closed
11/13/2010	12:45:39 PM	Bubbler valve closed
11/13/2010	12:45:39 PM	Main Vac valve opened
11/13/2010	12:45:39 PM	Bypass valve opened
11/13/2010	12:45:39 PM	Helium MFC set to  0.000000
11/13/2010	12:45:39 PM	H2 MFC set to  0.000000
11/13/2010	12:45:39 PM	BCl3 MFC set to  0.000000
11/13/2010	12:45:39 PM	PHl3 MFC set to  0.000000
11/13/2010	12:45:39 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:45:39 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:45:39 PM	Tube furnace set to 0
11/13/2010	12:46:39 PM	H2 valve closed
11/13/2010	12:46:39 PM	BCl3 valve closed
11/13/2010	12:46:39 PM	PH3 valve closed
11/13/2010	12:46:39 PM	SiCl4 pre valve closed
11/13/2010	12:46:39 PM	SiCl4 post valve closed
11/13/2010	12:46:39 PM	Bubbler valve closed
11/13/2010	12:46:39 PM	Helium valve opened
11/13/2010	12:46:39 PM	Main Vac valve opened
11/13/2010	12:46:39 PM	Bypass valve opened
11/13/2010	12:46:39 PM	Helium MFC set to  100.000000
11/13/2010	12:46:39 PM	H2 MFC set to  0.000000
11/13/2010	12:46:39 PM	BCl3 MFC set to  0.000000
11/13/2010	12:46:39 PM	PHl3 MFC set to  0.000000
11/13/2010	12:46:39 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:46:39 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:46:39 PM	Tube furnace set to 0
11/13/2010	12:47:39 PM	Helium valve closed
11/13/2010	12:47:39 PM	H2 valve closed
11/13/2010	12:47:39 PM	BCl3 valve closed
11/13/2010	12:47:39 PM	PH3 valve closed
11/13/2010	12:47:39 PM	SiCl4 pre valve closed
11/13/2010	12:47:39 PM	SiCl4 post valve closed
11/13/2010	12:47:39 PM	Bubbler valve closed
11/13/2010	12:47:39 PM	Main Vac valve opened
11/13/2010	12:47:39 PM	Bypass valve opened
11/13/2010	12:47:39 PM	Helium MFC set to  0.000000
11/13/2010	12:47:39 PM	H2 MFC set to  0.000000
11/13/2010	12:47:39 PM	BCl3 MFC set to  0.000000
11/13/2010	12:47:39 PM	PHl3 MFC set to  0.000000
11/13/2010	12:47:39 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:47:39 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:47:40 PM	Tube furnace set to 0
11/13/2010	12:47:41 PM	Run finished at 12:47 PM
11/13/2010	12:47:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/13/2010	12:52:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/13/2010	12:52:42 PM	Recipe started at 12:52 PM
11/13/2010	12:52:42 PM	Helium valve closed
11/13/2010	12:52:42 PM	H2 valve closed
11/13/2010	12:52:42 PM	BCl3 valve closed
11/13/2010	12:52:42 PM	PH3 valve closed
11/13/2010	12:52:42 PM	SiCl4 pre valve closed
11/13/2010	12:52:42 PM	SiCl4 post valve closed
11/13/2010	12:52:42 PM	Main Vac valve closed
11/13/2010	12:52:42 PM	Bubbler valve closed
11/13/2010	12:52:42 PM	Bypass valve opened
11/13/2010	12:52:42 PM	Helium MFC set to  0.000000
11/13/2010	12:52:42 PM	H2 MFC set to  0.000000
11/13/2010	12:52:42 PM	BCl3 MFC set to  0.000000
11/13/2010	12:52:42 PM	PHl3 MFC set to  0.000000
11/13/2010	12:52:42 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:52:42 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:52:42 PM	Tube furnace set to 0
11/13/2010	12:52:43 PM	Helium valve closed
11/13/2010	12:52:43 PM	H2 valve closed
11/13/2010	12:52:43 PM	BCl3 valve closed
11/13/2010	12:52:43 PM	PH3 valve closed
11/13/2010	12:52:43 PM	SiCl4 pre valve closed
11/13/2010	12:52:43 PM	SiCl4 post valve closed
11/13/2010	12:52:43 PM	Bubbler valve closed
11/13/2010	12:52:43 PM	Main Vac valve opened
11/13/2010	12:52:43 PM	Bypass valve opened
11/13/2010	12:52:43 PM	Helium MFC set to  0.000000
11/13/2010	12:52:43 PM	H2 MFC set to  0.000000
11/13/2010	12:52:43 PM	BCl3 MFC set to  0.000000
11/13/2010	12:52:43 PM	PHl3 MFC set to  0.000000
11/13/2010	12:52:43 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:52:43 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:52:43 PM	Tube furnace set to 0
11/13/2010	12:53:43 PM	H2 valve closed
11/13/2010	12:53:43 PM	BCl3 valve closed
11/13/2010	12:53:43 PM	PH3 valve closed
11/13/2010	12:53:43 PM	SiCl4 pre valve closed
11/13/2010	12:53:43 PM	SiCl4 post valve closed
11/13/2010	12:53:43 PM	Bubbler valve closed
11/13/2010	12:53:43 PM	Helium valve opened
11/13/2010	12:53:43 PM	Main Vac valve opened
11/13/2010	12:53:43 PM	Bypass valve opened
11/13/2010	12:53:43 PM	Helium MFC set to  100.000000
11/13/2010	12:53:43 PM	H2 MFC set to  0.000000
11/13/2010	12:53:43 PM	BCl3 MFC set to  0.000000
11/13/2010	12:53:43 PM	PHl3 MFC set to  0.000000
11/13/2010	12:53:43 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:53:43 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:53:43 PM	Tube furnace set to 0
11/13/2010	12:54:43 PM	Helium valve closed
11/13/2010	12:54:43 PM	H2 valve closed
11/13/2010	12:54:43 PM	BCl3 valve closed
11/13/2010	12:54:43 PM	PH3 valve closed
11/13/2010	12:54:43 PM	SiCl4 pre valve closed
11/13/2010	12:54:43 PM	SiCl4 post valve closed
11/13/2010	12:54:43 PM	Bubbler valve closed
11/13/2010	12:54:43 PM	Main Vac valve opened
11/13/2010	12:54:43 PM	Bypass valve opened
11/13/2010	12:54:43 PM	Helium MFC set to  0.000000
11/13/2010	12:54:43 PM	H2 MFC set to  0.000000
11/13/2010	12:54:43 PM	BCl3 MFC set to  0.000000
11/13/2010	12:54:43 PM	PHl3 MFC set to  0.000000
11/13/2010	12:54:43 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:54:43 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:54:43 PM	Tube furnace set to 0
11/13/2010	12:55:43 PM	H2 valve closed
11/13/2010	12:55:43 PM	BCl3 valve closed
11/13/2010	12:55:43 PM	PH3 valve closed
11/13/2010	12:55:43 PM	SiCl4 pre valve closed
11/13/2010	12:55:43 PM	SiCl4 post valve closed
11/13/2010	12:55:43 PM	Bubbler valve closed
11/13/2010	12:55:43 PM	Helium valve opened
11/13/2010	12:55:43 PM	Main Vac valve opened
11/13/2010	12:55:43 PM	Bypass valve opened
11/13/2010	12:55:43 PM	Helium MFC set to  100.000000
11/13/2010	12:55:43 PM	H2 MFC set to  0.000000
11/13/2010	12:55:43 PM	BCl3 MFC set to  0.000000
11/13/2010	12:55:43 PM	PHl3 MFC set to  0.000000
11/13/2010	12:55:43 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:55:43 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:55:43 PM	Tube furnace set to 0
11/13/2010	12:56:43 PM	Helium valve closed
11/13/2010	12:56:43 PM	H2 valve closed
11/13/2010	12:56:43 PM	BCl3 valve closed
11/13/2010	12:56:43 PM	PH3 valve closed
11/13/2010	12:56:43 PM	SiCl4 pre valve closed
11/13/2010	12:56:43 PM	SiCl4 post valve closed
11/13/2010	12:56:43 PM	Bubbler valve closed
11/13/2010	12:56:43 PM	Main Vac valve opened
11/13/2010	12:56:43 PM	Bypass valve opened
11/13/2010	12:56:43 PM	Helium MFC set to  0.000000
11/13/2010	12:56:43 PM	H2 MFC set to  0.000000
11/13/2010	12:56:43 PM	BCl3 MFC set to  0.000000
11/13/2010	12:56:43 PM	PHl3 MFC set to  0.000000
11/13/2010	12:56:43 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:56:43 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:56:43 PM	Tube furnace set to 0
11/13/2010	12:57:43 PM	H2 valve closed
11/13/2010	12:57:43 PM	BCl3 valve closed
11/13/2010	12:57:43 PM	PH3 valve closed
11/13/2010	12:57:43 PM	SiCl4 pre valve closed
11/13/2010	12:57:43 PM	SiCl4 post valve closed
11/13/2010	12:57:43 PM	Bubbler valve closed
11/13/2010	12:57:43 PM	Helium valve opened
11/13/2010	12:57:43 PM	Main Vac valve opened
11/13/2010	12:57:43 PM	Bypass valve opened
11/13/2010	12:57:43 PM	Helium MFC set to  100.000000
11/13/2010	12:57:43 PM	H2 MFC set to  0.000000
11/13/2010	12:57:43 PM	BCl3 MFC set to  0.000000
11/13/2010	12:57:43 PM	PHl3 MFC set to  0.000000
11/13/2010	12:57:43 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:57:44 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:57:44 PM	Tube furnace set to 0
11/13/2010	12:58:44 PM	Helium valve closed
11/13/2010	12:58:44 PM	H2 valve closed
11/13/2010	12:58:44 PM	BCl3 valve closed
11/13/2010	12:58:44 PM	PH3 valve closed
11/13/2010	12:58:44 PM	SiCl4 pre valve closed
11/13/2010	12:58:44 PM	SiCl4 post valve closed
11/13/2010	12:58:44 PM	Bubbler valve closed
11/13/2010	12:58:44 PM	Main Vac valve opened
11/13/2010	12:58:44 PM	Bypass valve opened
11/13/2010	12:58:44 PM	Helium MFC set to  0.000000
11/13/2010	12:58:44 PM	H2 MFC set to  0.000000
11/13/2010	12:58:44 PM	BCl3 MFC set to  0.000000
11/13/2010	12:58:44 PM	PHl3 MFC set to  0.000000
11/13/2010	12:58:44 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:58:44 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:58:44 PM	Tube furnace set to 0
11/13/2010	12:59:44 PM	H2 valve closed
11/13/2010	12:59:44 PM	BCl3 valve closed
11/13/2010	12:59:44 PM	PH3 valve closed
11/13/2010	12:59:44 PM	SiCl4 pre valve closed
11/13/2010	12:59:44 PM	SiCl4 post valve closed
11/13/2010	12:59:44 PM	Bubbler valve closed
11/13/2010	12:59:44 PM	Helium valve opened
11/13/2010	12:59:44 PM	Main Vac valve opened
11/13/2010	12:59:44 PM	Bypass valve opened
11/13/2010	12:59:44 PM	Helium MFC set to  100.000000
11/13/2010	12:59:44 PM	H2 MFC set to  0.000000
11/13/2010	12:59:44 PM	BCl3 MFC set to  0.000000
11/13/2010	12:59:44 PM	PHl3 MFC set to  0.000000
11/13/2010	12:59:44 PM	SiCl4 MFC set to  0.000000
11/13/2010	12:59:44 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	12:59:44 PM	Tube furnace set to 0
11/13/2010	1:00:44 PM	Helium valve closed
11/13/2010	1:00:44 PM	H2 valve closed
11/13/2010	1:00:44 PM	BCl3 valve closed
11/13/2010	1:00:44 PM	PH3 valve closed
11/13/2010	1:00:44 PM	SiCl4 pre valve closed
11/13/2010	1:00:44 PM	SiCl4 post valve closed
11/13/2010	1:00:44 PM	Bubbler valve closed
11/13/2010	1:00:44 PM	Main Vac valve opened
11/13/2010	1:00:44 PM	Bypass valve opened
11/13/2010	1:00:44 PM	Helium MFC set to  0.000000
11/13/2010	1:00:44 PM	H2 MFC set to  0.000000
11/13/2010	1:00:44 PM	BCl3 MFC set to  0.000000
11/13/2010	1:00:44 PM	PHl3 MFC set to  0.000000
11/13/2010	1:00:44 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:00:44 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:00:44 PM	Tube furnace set to 0
11/13/2010	1:01:44 PM	H2 valve closed
11/13/2010	1:01:44 PM	BCl3 valve closed
11/13/2010	1:01:44 PM	PH3 valve closed
11/13/2010	1:01:44 PM	SiCl4 pre valve closed
11/13/2010	1:01:44 PM	SiCl4 post valve closed
11/13/2010	1:01:44 PM	Bubbler valve closed
11/13/2010	1:01:44 PM	Helium valve opened
11/13/2010	1:01:44 PM	Main Vac valve opened
11/13/2010	1:01:44 PM	Bypass valve opened
11/13/2010	1:01:44 PM	Helium MFC set to  100.000000
11/13/2010	1:01:44 PM	H2 MFC set to  0.000000
11/13/2010	1:01:44 PM	BCl3 MFC set to  0.000000
11/13/2010	1:01:44 PM	PHl3 MFC set to  0.000000
11/13/2010	1:01:44 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:01:44 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:01:44 PM	Tube furnace set to 0
11/13/2010	1:02:44 PM	Helium valve closed
11/13/2010	1:02:44 PM	H2 valve closed
11/13/2010	1:02:44 PM	BCl3 valve closed
11/13/2010	1:02:44 PM	PH3 valve closed
11/13/2010	1:02:44 PM	SiCl4 pre valve closed
11/13/2010	1:02:44 PM	SiCl4 post valve closed
11/13/2010	1:02:44 PM	Bubbler valve closed
11/13/2010	1:02:44 PM	Main Vac valve opened
11/13/2010	1:02:44 PM	Bypass valve opened
11/13/2010	1:02:44 PM	Helium MFC set to  0.000000
11/13/2010	1:02:44 PM	H2 MFC set to  0.000000
11/13/2010	1:02:44 PM	BCl3 MFC set to  0.000000
11/13/2010	1:02:44 PM	PHl3 MFC set to  0.000000
11/13/2010	1:02:44 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:02:44 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:02:45 PM	Tube furnace set to 0
11/13/2010	1:03:45 PM	H2 valve closed
11/13/2010	1:03:45 PM	BCl3 valve closed
11/13/2010	1:03:45 PM	PH3 valve closed
11/13/2010	1:03:45 PM	SiCl4 pre valve closed
11/13/2010	1:03:45 PM	SiCl4 post valve closed
11/13/2010	1:03:45 PM	Bubbler valve closed
11/13/2010	1:03:45 PM	Helium valve opened
11/13/2010	1:03:45 PM	Main Vac valve opened
11/13/2010	1:03:45 PM	Bypass valve opened
11/13/2010	1:03:45 PM	Helium MFC set to  100.000000
11/13/2010	1:03:45 PM	H2 MFC set to  0.000000
11/13/2010	1:03:45 PM	BCl3 MFC set to  0.000000
11/13/2010	1:03:45 PM	PHl3 MFC set to  0.000000
11/13/2010	1:03:45 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:03:45 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:03:45 PM	Tube furnace set to 0
11/13/2010	1:04:45 PM	Helium valve closed
11/13/2010	1:04:45 PM	H2 valve closed
11/13/2010	1:04:45 PM	BCl3 valve closed
11/13/2010	1:04:45 PM	PH3 valve closed
11/13/2010	1:04:45 PM	SiCl4 pre valve closed
11/13/2010	1:04:45 PM	SiCl4 post valve closed
11/13/2010	1:04:45 PM	Bubbler valve closed
11/13/2010	1:04:45 PM	Main Vac valve opened
11/13/2010	1:04:45 PM	Bypass valve opened
11/13/2010	1:04:45 PM	Helium MFC set to  0.000000
11/13/2010	1:04:45 PM	H2 MFC set to  0.000000
11/13/2010	1:04:45 PM	BCl3 MFC set to  0.000000
11/13/2010	1:04:45 PM	PHl3 MFC set to  0.000000
11/13/2010	1:04:45 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:04:45 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:04:45 PM	Tube furnace set to 0
11/13/2010	1:05:45 PM	H2 valve closed
11/13/2010	1:05:45 PM	BCl3 valve closed
11/13/2010	1:05:45 PM	PH3 valve closed
11/13/2010	1:05:45 PM	SiCl4 pre valve closed
11/13/2010	1:05:45 PM	SiCl4 post valve closed
11/13/2010	1:05:45 PM	Bubbler valve closed
11/13/2010	1:05:45 PM	Helium valve opened
11/13/2010	1:05:45 PM	Main Vac valve opened
11/13/2010	1:05:45 PM	Bypass valve opened
11/13/2010	1:05:45 PM	Helium MFC set to  100.000000
11/13/2010	1:05:45 PM	H2 MFC set to  0.000000
11/13/2010	1:05:45 PM	BCl3 MFC set to  0.000000
11/13/2010	1:05:45 PM	PHl3 MFC set to  0.000000
11/13/2010	1:05:45 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:05:45 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:05:45 PM	Tube furnace set to 0
11/13/2010	1:06:45 PM	Helium valve closed
11/13/2010	1:06:45 PM	H2 valve closed
11/13/2010	1:06:45 PM	BCl3 valve closed
11/13/2010	1:06:45 PM	PH3 valve closed
11/13/2010	1:06:45 PM	SiCl4 pre valve closed
11/13/2010	1:06:45 PM	SiCl4 post valve closed
11/13/2010	1:06:45 PM	Bubbler valve closed
11/13/2010	1:06:45 PM	Main Vac valve opened
11/13/2010	1:06:45 PM	Bypass valve opened
11/13/2010	1:06:45 PM	Helium MFC set to  0.000000
11/13/2010	1:06:45 PM	H2 MFC set to  0.000000
11/13/2010	1:06:45 PM	BCl3 MFC set to  0.000000
11/13/2010	1:06:45 PM	PHl3 MFC set to  0.000000
11/13/2010	1:06:45 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:06:45 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:06:45 PM	Tube furnace set to 0
11/13/2010	1:07:45 PM	H2 valve closed
11/13/2010	1:07:45 PM	BCl3 valve closed
11/13/2010	1:07:45 PM	PH3 valve closed
11/13/2010	1:07:45 PM	SiCl4 pre valve closed
11/13/2010	1:07:45 PM	SiCl4 post valve closed
11/13/2010	1:07:45 PM	Bubbler valve closed
11/13/2010	1:07:45 PM	Helium valve opened
11/13/2010	1:07:45 PM	Main Vac valve opened
11/13/2010	1:07:45 PM	Bypass valve opened
11/13/2010	1:07:45 PM	Helium MFC set to  100.000000
11/13/2010	1:07:45 PM	H2 MFC set to  0.000000
11/13/2010	1:07:45 PM	BCl3 MFC set to  0.000000
11/13/2010	1:07:45 PM	PHl3 MFC set to  0.000000
11/13/2010	1:07:45 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:07:45 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:07:46 PM	Tube furnace set to 0
11/13/2010	1:08:46 PM	Helium valve closed
11/13/2010	1:08:46 PM	H2 valve closed
11/13/2010	1:08:46 PM	BCl3 valve closed
11/13/2010	1:08:46 PM	PH3 valve closed
11/13/2010	1:08:46 PM	SiCl4 pre valve closed
11/13/2010	1:08:46 PM	SiCl4 post valve closed
11/13/2010	1:08:46 PM	Bubbler valve closed
11/13/2010	1:08:46 PM	Main Vac valve opened
11/13/2010	1:08:46 PM	Bypass valve opened
11/13/2010	1:08:46 PM	Helium MFC set to  0.000000
11/13/2010	1:08:46 PM	H2 MFC set to  0.000000
11/13/2010	1:08:46 PM	BCl3 MFC set to  0.000000
11/13/2010	1:08:46 PM	PHl3 MFC set to  0.000000
11/13/2010	1:08:46 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:08:46 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:08:46 PM	Tube furnace set to 0
11/13/2010	1:09:46 PM	H2 valve closed
11/13/2010	1:09:46 PM	BCl3 valve closed
11/13/2010	1:09:46 PM	PH3 valve closed
11/13/2010	1:09:46 PM	SiCl4 pre valve closed
11/13/2010	1:09:46 PM	SiCl4 post valve closed
11/13/2010	1:09:46 PM	Bubbler valve closed
11/13/2010	1:09:46 PM	Helium valve opened
11/13/2010	1:09:46 PM	Main Vac valve opened
11/13/2010	1:09:46 PM	Bypass valve opened
11/13/2010	1:09:46 PM	Helium MFC set to  100.000000
11/13/2010	1:09:46 PM	H2 MFC set to  0.000000
11/13/2010	1:09:46 PM	BCl3 MFC set to  0.000000
11/13/2010	1:09:46 PM	PHl3 MFC set to  0.000000
11/13/2010	1:09:46 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:09:46 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:09:46 PM	Tube furnace set to 0
11/13/2010	1:10:46 PM	Helium valve closed
11/13/2010	1:10:46 PM	H2 valve closed
11/13/2010	1:10:46 PM	BCl3 valve closed
11/13/2010	1:10:46 PM	PH3 valve closed
11/13/2010	1:10:46 PM	SiCl4 pre valve closed
11/13/2010	1:10:46 PM	SiCl4 post valve closed
11/13/2010	1:10:46 PM	Bubbler valve closed
11/13/2010	1:10:46 PM	Main Vac valve opened
11/13/2010	1:10:46 PM	Bypass valve opened
11/13/2010	1:10:46 PM	Helium MFC set to  0.000000
11/13/2010	1:10:46 PM	H2 MFC set to  0.000000
11/13/2010	1:10:46 PM	BCl3 MFC set to  0.000000
11/13/2010	1:10:46 PM	PHl3 MFC set to  0.000000
11/13/2010	1:10:46 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:10:46 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:10:46 PM	Tube furnace set to 0
11/13/2010	1:11:46 PM	H2 valve closed
11/13/2010	1:11:46 PM	BCl3 valve closed
11/13/2010	1:11:46 PM	PH3 valve closed
11/13/2010	1:11:46 PM	SiCl4 pre valve closed
11/13/2010	1:11:46 PM	SiCl4 post valve closed
11/13/2010	1:11:46 PM	Bubbler valve closed
11/13/2010	1:11:46 PM	Helium valve opened
11/13/2010	1:11:46 PM	Main Vac valve opened
11/13/2010	1:11:46 PM	Bypass valve opened
11/13/2010	1:11:46 PM	Helium MFC set to  100.000000
11/13/2010	1:11:46 PM	H2 MFC set to  0.000000
11/13/2010	1:11:46 PM	BCl3 MFC set to  0.000000
11/13/2010	1:11:46 PM	PHl3 MFC set to  0.000000
11/13/2010	1:11:46 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:11:46 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:11:46 PM	Tube furnace set to 0
11/13/2010	1:12:46 PM	Helium valve closed
11/13/2010	1:12:46 PM	H2 valve closed
11/13/2010	1:12:46 PM	BCl3 valve closed
11/13/2010	1:12:46 PM	PH3 valve closed
11/13/2010	1:12:46 PM	SiCl4 pre valve closed
11/13/2010	1:12:46 PM	SiCl4 post valve closed
11/13/2010	1:12:46 PM	Bubbler valve closed
11/13/2010	1:12:46 PM	Main Vac valve opened
11/13/2010	1:12:46 PM	Bypass valve opened
11/13/2010	1:12:46 PM	Helium MFC set to  0.000000
11/13/2010	1:12:46 PM	H2 MFC set to  0.000000
11/13/2010	1:12:46 PM	BCl3 MFC set to  0.000000
11/13/2010	1:12:46 PM	PHl3 MFC set to  0.000000
11/13/2010	1:12:46 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:12:47 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:12:47 PM	Tube furnace set to 0
11/13/2010	1:12:48 PM	Run finished at 1:12 PM
11/13/2010	1:12:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/13/2010	1:16:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	1:16:06 PM	Recipe started at 1:16 PM
11/13/2010	1:16:06 PM	Helium valve closed
11/13/2010	1:16:06 PM	H2 valve closed
11/13/2010	1:16:06 PM	BCl3 valve closed
11/13/2010	1:16:06 PM	PH3 valve closed
11/13/2010	1:16:06 PM	SiCl4 pre valve closed
11/13/2010	1:16:06 PM	SiCl4 post valve closed
11/13/2010	1:16:06 PM	Main Vac valve closed
11/13/2010	1:16:06 PM	Bubbler valve closed
11/13/2010	1:16:06 PM	Bypass valve opened
11/13/2010	1:16:06 PM	Helium MFC set to  0.000000
11/13/2010	1:16:06 PM	H2 MFC set to  0.000000
11/13/2010	1:16:06 PM	BCl3 MFC set to  0.000000
11/13/2010	1:16:06 PM	PHl3 MFC set to  0.000000
11/13/2010	1:16:06 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:16:06 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:16:06 PM	Tube furnace set to 0
11/13/2010	1:16:07 PM	Helium valve closed
11/13/2010	1:16:07 PM	H2 valve closed
11/13/2010	1:16:07 PM	BCl3 valve closed
11/13/2010	1:16:07 PM	PH3 valve closed
11/13/2010	1:16:07 PM	SiCl4 pre valve closed
11/13/2010	1:16:07 PM	SiCl4 post valve closed
11/13/2010	1:16:07 PM	Bubbler valve closed
11/13/2010	1:16:07 PM	Main Vac valve opened
11/13/2010	1:16:07 PM	Bypass valve opened
11/13/2010	1:16:07 PM	Helium MFC set to  0.000000
11/13/2010	1:16:07 PM	H2 MFC set to  0.000000
11/13/2010	1:16:07 PM	BCl3 MFC set to  0.000000
11/13/2010	1:16:07 PM	PHl3 MFC set to  0.000000
11/13/2010	1:16:07 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:16:07 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:16:07 PM	Tube furnace set to 0
11/13/2010	1:16:07 PM	Run finished at 1:16 PM
11/13/2010	1:16:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	1:16:20 PM	Helium MFC set to  100.000000
11/13/2010	1:16:21 PM	Helium valve opened
11/13/2010	1:18:39 PM	Helium valve closed
11/13/2010	1:18:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	1:18:41 PM	Recipe started at 1:18 PM
11/13/2010	1:18:41 PM	Helium valve closed
11/13/2010	1:18:41 PM	H2 valve closed
11/13/2010	1:18:41 PM	BCl3 valve closed
11/13/2010	1:18:41 PM	PH3 valve closed
11/13/2010	1:18:41 PM	SiCl4 pre valve closed
11/13/2010	1:18:41 PM	SiCl4 post valve closed
11/13/2010	1:18:41 PM	Main Vac valve closed
11/13/2010	1:18:41 PM	Bubbler valve closed
11/13/2010	1:18:41 PM	Bypass valve opened
11/13/2010	1:18:41 PM	Helium MFC set to  0.000000
11/13/2010	1:18:41 PM	H2 MFC set to  0.000000
11/13/2010	1:18:41 PM	BCl3 MFC set to  0.000000
11/13/2010	1:18:41 PM	PHl3 MFC set to  0.000000
11/13/2010	1:18:41 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:18:41 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:18:42 PM	Tube furnace set to 0
11/13/2010	1:18:42 PM	Helium valve closed
11/13/2010	1:18:42 PM	H2 valve closed
11/13/2010	1:18:42 PM	BCl3 valve closed
11/13/2010	1:18:42 PM	PH3 valve closed
11/13/2010	1:18:42 PM	SiCl4 pre valve closed
11/13/2010	1:18:42 PM	SiCl4 post valve closed
11/13/2010	1:18:42 PM	Bubbler valve closed
11/13/2010	1:18:42 PM	Main Vac valve opened
11/13/2010	1:18:42 PM	Bypass valve opened
11/13/2010	1:18:42 PM	Helium MFC set to  0.000000
11/13/2010	1:18:42 PM	H2 MFC set to  0.000000
11/13/2010	1:18:42 PM	BCl3 MFC set to  0.000000
11/13/2010	1:18:42 PM	PHl3 MFC set to  0.000000
11/13/2010	1:18:42 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:18:42 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:18:42 PM	Tube furnace set to 0
11/13/2010	1:18:42 PM	Run finished at 1:18 PM
11/13/2010	1:18:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	1:20:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	1:20:29 PM	Recipe started at 1:20 PM
11/13/2010	1:20:29 PM	H2 valve closed
11/13/2010	1:20:29 PM	BCl3 valve closed
11/13/2010	1:20:29 PM	PH3 valve closed
11/13/2010	1:20:29 PM	SiCl4 pre valve closed
11/13/2010	1:20:29 PM	SiCl4 post valve closed
11/13/2010	1:20:29 PM	Main Vac valve closed
11/13/2010	1:20:29 PM	Bypass valve closed
11/13/2010	1:20:29 PM	Bubbler valve closed
11/13/2010	1:20:29 PM	Helium valve opened
11/13/2010	1:20:29 PM	Helium MFC set to  500.000000
11/13/2010	1:20:29 PM	H2 MFC set to  0.000000
11/13/2010	1:20:29 PM	BCl3 MFC set to  0.000000
11/13/2010	1:20:29 PM	PHl3 MFC set to  0.000000
11/13/2010	1:20:29 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:20:29 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:20:29 PM	Tube furnace set to 0
11/13/2010	1:21:48 PM	Helium valve closed
11/13/2010	1:21:48 PM	H2 valve closed
11/13/2010	1:21:48 PM	BCl3 valve closed
11/13/2010	1:21:48 PM	PH3 valve closed
11/13/2010	1:21:48 PM	SiCl4 pre valve closed
11/13/2010	1:21:48 PM	SiCl4 post valve closed
11/13/2010	1:21:48 PM	Main Vac valve closed
11/13/2010	1:21:48 PM	Bypass valve closed
11/13/2010	1:21:48 PM	Bubbler valve closed
11/13/2010	1:21:48 PM	Helium MFC set to  0.000000
11/13/2010	1:21:48 PM	H2 MFC set to  0.000000
11/13/2010	1:21:48 PM	BCl3 MFC set to  0.000000
11/13/2010	1:21:48 PM	PHl3 MFC set to  0.000000
11/13/2010	1:21:48 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:21:48 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:21:48 PM	Tube furnace set to 0
11/13/2010	1:21:48 PM	Run finished at 1:21 PM
11/13/2010	1:21:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	1:33:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	1:33:12 PM	Recipe started at 1:33 PM
11/13/2010	1:33:12 PM	Helium valve closed
11/13/2010	1:33:12 PM	H2 valve closed
11/13/2010	1:33:12 PM	BCl3 valve closed
11/13/2010	1:33:12 PM	PH3 valve closed
11/13/2010	1:33:12 PM	SiCl4 pre valve closed
11/13/2010	1:33:12 PM	SiCl4 post valve closed
11/13/2010	1:33:12 PM	Main Vac valve closed
11/13/2010	1:33:12 PM	Bubbler valve closed
11/13/2010	1:33:12 PM	Bypass valve opened
11/13/2010	1:33:12 PM	Helium MFC set to  0.000000
11/13/2010	1:33:12 PM	H2 MFC set to  0.000000
11/13/2010	1:33:12 PM	BCl3 MFC set to  0.000000
11/13/2010	1:33:12 PM	PHl3 MFC set to  0.000000
11/13/2010	1:33:12 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:33:12 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:33:13 PM	Tube furnace set to 0
11/13/2010	1:34:04 PM	Helium valve closed
11/13/2010	1:34:04 PM	H2 valve closed
11/13/2010	1:34:04 PM	BCl3 valve closed
11/13/2010	1:34:04 PM	PH3 valve closed
11/13/2010	1:34:04 PM	SiCl4 pre valve closed
11/13/2010	1:34:04 PM	SiCl4 post valve closed
11/13/2010	1:34:04 PM	Bubbler valve closed
11/13/2010	1:34:04 PM	Main Vac valve opened
11/13/2010	1:34:04 PM	Bypass valve opened
11/13/2010	1:34:04 PM	Helium MFC set to  0.000000
11/13/2010	1:34:04 PM	H2 MFC set to  0.000000
11/13/2010	1:34:04 PM	BCl3 MFC set to  0.000000
11/13/2010	1:34:04 PM	PHl3 MFC set to  0.000000
11/13/2010	1:34:04 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:34:04 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:34:04 PM	Tube furnace set to 0
11/13/2010	1:34:05 PM	Run finished at 1:34 PM
11/13/2010	1:34:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	1:34:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/13/2010	1:34:39 PM	Recipe started at 1:34 PM
11/13/2010	1:34:39 PM	Helium valve closed
11/13/2010	1:34:39 PM	H2 valve closed
11/13/2010	1:34:39 PM	BCl3 valve closed
11/13/2010	1:34:39 PM	PH3 valve closed
11/13/2010	1:34:39 PM	SiCl4 pre valve closed
11/13/2010	1:34:39 PM	SiCl4 post valve closed
11/13/2010	1:34:39 PM	Main Vac valve closed
11/13/2010	1:34:39 PM	Bubbler valve closed
11/13/2010	1:34:39 PM	Bypass valve opened
11/13/2010	1:34:39 PM	Helium MFC set to  0.000000
11/13/2010	1:34:39 PM	H2 MFC set to  0.000000
11/13/2010	1:34:39 PM	BCl3 MFC set to  0.000000
11/13/2010	1:34:40 PM	PHl3 MFC set to  0.000000
11/13/2010	1:34:40 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:34:40 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:34:40 PM	Tube furnace set to 0
11/13/2010	1:34:40 PM	Helium valve closed
11/13/2010	1:34:40 PM	H2 valve closed
11/13/2010	1:34:40 PM	BCl3 valve closed
11/13/2010	1:34:40 PM	PH3 valve closed
11/13/2010	1:34:40 PM	SiCl4 pre valve closed
11/13/2010	1:34:40 PM	SiCl4 post valve closed
11/13/2010	1:34:40 PM	Bubbler valve closed
11/13/2010	1:34:40 PM	Main Vac valve opened
11/13/2010	1:34:40 PM	Bypass valve opened
11/13/2010	1:34:40 PM	Helium MFC set to  0.000000
11/13/2010	1:34:40 PM	H2 MFC set to  0.000000
11/13/2010	1:34:40 PM	BCl3 MFC set to  0.000000
11/13/2010	1:34:40 PM	PHl3 MFC set to  0.000000
11/13/2010	1:34:40 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:34:40 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:34:40 PM	Tube furnace set to 0
11/13/2010	1:35:40 PM	H2 valve closed
11/13/2010	1:35:40 PM	BCl3 valve closed
11/13/2010	1:35:40 PM	PH3 valve closed
11/13/2010	1:35:40 PM	SiCl4 pre valve closed
11/13/2010	1:35:40 PM	SiCl4 post valve closed
11/13/2010	1:35:40 PM	Bubbler valve closed
11/13/2010	1:35:40 PM	Helium valve opened
11/13/2010	1:35:40 PM	Main Vac valve opened
11/13/2010	1:35:40 PM	Bypass valve opened
11/13/2010	1:35:40 PM	Helium MFC set to  100.000000
11/13/2010	1:35:40 PM	H2 MFC set to  0.000000
11/13/2010	1:35:40 PM	BCl3 MFC set to  0.000000
11/13/2010	1:35:40 PM	PHl3 MFC set to  0.000000
11/13/2010	1:35:40 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:35:40 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:35:40 PM	Tube furnace set to 0
11/13/2010	1:36:40 PM	Helium valve closed
11/13/2010	1:36:40 PM	H2 valve closed
11/13/2010	1:36:40 PM	BCl3 valve closed
11/13/2010	1:36:40 PM	PH3 valve closed
11/13/2010	1:36:40 PM	SiCl4 pre valve closed
11/13/2010	1:36:40 PM	SiCl4 post valve closed
11/13/2010	1:36:40 PM	Bubbler valve closed
11/13/2010	1:36:40 PM	Main Vac valve opened
11/13/2010	1:36:40 PM	Bypass valve opened
11/13/2010	1:36:40 PM	Helium MFC set to  0.000000
11/13/2010	1:36:40 PM	H2 MFC set to  0.000000
11/13/2010	1:36:40 PM	BCl3 MFC set to  0.000000
11/13/2010	1:36:40 PM	PHl3 MFC set to  0.000000
11/13/2010	1:36:40 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:36:40 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:36:40 PM	Tube furnace set to 0
11/13/2010	1:37:41 PM	H2 valve closed
11/13/2010	1:37:41 PM	BCl3 valve closed
11/13/2010	1:37:41 PM	PH3 valve closed
11/13/2010	1:37:41 PM	SiCl4 pre valve closed
11/13/2010	1:37:41 PM	SiCl4 post valve closed
11/13/2010	1:37:41 PM	Bubbler valve closed
11/13/2010	1:37:41 PM	Helium valve opened
11/13/2010	1:37:41 PM	Main Vac valve opened
11/13/2010	1:37:41 PM	Bypass valve opened
11/13/2010	1:37:41 PM	Helium MFC set to  100.000000
11/13/2010	1:37:41 PM	H2 MFC set to  0.000000
11/13/2010	1:37:41 PM	BCl3 MFC set to  0.000000
11/13/2010	1:37:41 PM	PHl3 MFC set to  0.000000
11/13/2010	1:37:41 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:37:41 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:37:41 PM	Tube furnace set to 0
11/13/2010	1:38:41 PM	Helium valve closed
11/13/2010	1:38:41 PM	H2 valve closed
11/13/2010	1:38:41 PM	BCl3 valve closed
11/13/2010	1:38:41 PM	PH3 valve closed
11/13/2010	1:38:41 PM	SiCl4 pre valve closed
11/13/2010	1:38:41 PM	SiCl4 post valve closed
11/13/2010	1:38:41 PM	Bubbler valve closed
11/13/2010	1:38:41 PM	Main Vac valve opened
11/13/2010	1:38:41 PM	Bypass valve opened
11/13/2010	1:38:41 PM	Helium MFC set to  0.000000
11/13/2010	1:38:41 PM	H2 MFC set to  0.000000
11/13/2010	1:38:41 PM	BCl3 MFC set to  0.000000
11/13/2010	1:38:41 PM	PHl3 MFC set to  0.000000
11/13/2010	1:38:41 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:38:41 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:38:41 PM	Tube furnace set to 0
11/13/2010	1:39:41 PM	H2 valve closed
11/13/2010	1:39:41 PM	BCl3 valve closed
11/13/2010	1:39:41 PM	PH3 valve closed
11/13/2010	1:39:41 PM	SiCl4 pre valve closed
11/13/2010	1:39:41 PM	SiCl4 post valve closed
11/13/2010	1:39:41 PM	Bubbler valve closed
11/13/2010	1:39:41 PM	Helium valve opened
11/13/2010	1:39:41 PM	Main Vac valve opened
11/13/2010	1:39:41 PM	Bypass valve opened
11/13/2010	1:39:41 PM	Helium MFC set to  100.000000
11/13/2010	1:39:41 PM	H2 MFC set to  0.000000
11/13/2010	1:39:41 PM	BCl3 MFC set to  0.000000
11/13/2010	1:39:41 PM	PHl3 MFC set to  0.000000
11/13/2010	1:39:41 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:39:41 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:39:41 PM	Tube furnace set to 0
11/13/2010	1:40:41 PM	Helium valve closed
11/13/2010	1:40:41 PM	H2 valve closed
11/13/2010	1:40:41 PM	BCl3 valve closed
11/13/2010	1:40:41 PM	PH3 valve closed
11/13/2010	1:40:41 PM	SiCl4 pre valve closed
11/13/2010	1:40:41 PM	SiCl4 post valve closed
11/13/2010	1:40:41 PM	Bubbler valve closed
11/13/2010	1:40:41 PM	Main Vac valve opened
11/13/2010	1:40:41 PM	Bypass valve opened
11/13/2010	1:40:41 PM	Helium MFC set to  0.000000
11/13/2010	1:40:41 PM	H2 MFC set to  0.000000
11/13/2010	1:40:41 PM	BCl3 MFC set to  0.000000
11/13/2010	1:40:41 PM	PHl3 MFC set to  0.000000
11/13/2010	1:40:41 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:40:41 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:40:41 PM	Tube furnace set to 0
11/13/2010	1:41:41 PM	H2 valve closed
11/13/2010	1:41:41 PM	BCl3 valve closed
11/13/2010	1:41:41 PM	PH3 valve closed
11/13/2010	1:41:41 PM	SiCl4 pre valve closed
11/13/2010	1:41:41 PM	SiCl4 post valve closed
11/13/2010	1:41:41 PM	Bubbler valve closed
11/13/2010	1:41:41 PM	Helium valve opened
11/13/2010	1:41:41 PM	Main Vac valve opened
11/13/2010	1:41:41 PM	Bypass valve opened
11/13/2010	1:41:41 PM	Helium MFC set to  100.000000
11/13/2010	1:41:41 PM	H2 MFC set to  0.000000
11/13/2010	1:41:41 PM	BCl3 MFC set to  0.000000
11/13/2010	1:41:41 PM	PHl3 MFC set to  0.000000
11/13/2010	1:41:41 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:41:41 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:41:41 PM	Tube furnace set to 0
11/13/2010	1:42:42 PM	Helium valve closed
11/13/2010	1:42:42 PM	H2 valve closed
11/13/2010	1:42:42 PM	BCl3 valve closed
11/13/2010	1:42:42 PM	PH3 valve closed
11/13/2010	1:42:42 PM	SiCl4 pre valve closed
11/13/2010	1:42:42 PM	SiCl4 post valve closed
11/13/2010	1:42:42 PM	Bubbler valve closed
11/13/2010	1:42:42 PM	Main Vac valve opened
11/13/2010	1:42:42 PM	Bypass valve opened
11/13/2010	1:42:42 PM	Helium MFC set to  0.000000
11/13/2010	1:42:42 PM	H2 MFC set to  0.000000
11/13/2010	1:42:42 PM	BCl3 MFC set to  0.000000
11/13/2010	1:42:42 PM	PHl3 MFC set to  0.000000
11/13/2010	1:42:42 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:42:42 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:42:42 PM	Tube furnace set to 0
11/13/2010	1:43:42 PM	H2 valve closed
11/13/2010	1:43:42 PM	BCl3 valve closed
11/13/2010	1:43:42 PM	PH3 valve closed
11/13/2010	1:43:42 PM	SiCl4 pre valve closed
11/13/2010	1:43:42 PM	SiCl4 post valve closed
11/13/2010	1:43:42 PM	Bubbler valve closed
11/13/2010	1:43:42 PM	Helium valve opened
11/13/2010	1:43:42 PM	Main Vac valve opened
11/13/2010	1:43:42 PM	Bypass valve opened
11/13/2010	1:43:42 PM	Helium MFC set to  100.000000
11/13/2010	1:43:42 PM	H2 MFC set to  0.000000
11/13/2010	1:43:42 PM	BCl3 MFC set to  0.000000
11/13/2010	1:43:42 PM	PHl3 MFC set to  0.000000
11/13/2010	1:43:42 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:43:42 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:43:42 PM	Tube furnace set to 0
11/13/2010	1:44:42 PM	Helium valve closed
11/13/2010	1:44:42 PM	H2 valve closed
11/13/2010	1:44:42 PM	BCl3 valve closed
11/13/2010	1:44:42 PM	PH3 valve closed
11/13/2010	1:44:42 PM	SiCl4 pre valve closed
11/13/2010	1:44:42 PM	SiCl4 post valve closed
11/13/2010	1:44:42 PM	Bubbler valve closed
11/13/2010	1:44:42 PM	Main Vac valve opened
11/13/2010	1:44:42 PM	Bypass valve opened
11/13/2010	1:44:42 PM	Helium MFC set to  0.000000
11/13/2010	1:44:42 PM	H2 MFC set to  0.000000
11/13/2010	1:44:42 PM	BCl3 MFC set to  0.000000
11/13/2010	1:44:42 PM	PHl3 MFC set to  0.000000
11/13/2010	1:44:42 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:44:42 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:44:42 PM	Tube furnace set to 0
11/13/2010	1:45:42 PM	H2 valve closed
11/13/2010	1:45:42 PM	BCl3 valve closed
11/13/2010	1:45:42 PM	PH3 valve closed
11/13/2010	1:45:42 PM	SiCl4 pre valve closed
11/13/2010	1:45:42 PM	SiCl4 post valve closed
11/13/2010	1:45:42 PM	Bubbler valve closed
11/13/2010	1:45:42 PM	Helium valve opened
11/13/2010	1:45:42 PM	Main Vac valve opened
11/13/2010	1:45:42 PM	Bypass valve opened
11/13/2010	1:45:42 PM	Helium MFC set to  100.000000
11/13/2010	1:45:42 PM	H2 MFC set to  0.000000
11/13/2010	1:45:42 PM	BCl3 MFC set to  0.000000
11/13/2010	1:45:42 PM	PHl3 MFC set to  0.000000
11/13/2010	1:45:42 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:45:42 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:45:42 PM	Tube furnace set to 0
11/13/2010	1:46:42 PM	Helium valve closed
11/13/2010	1:46:42 PM	H2 valve closed
11/13/2010	1:46:42 PM	BCl3 valve closed
11/13/2010	1:46:42 PM	PH3 valve closed
11/13/2010	1:46:42 PM	SiCl4 pre valve closed
11/13/2010	1:46:42 PM	SiCl4 post valve closed
11/13/2010	1:46:42 PM	Bubbler valve closed
11/13/2010	1:46:42 PM	Main Vac valve opened
11/13/2010	1:46:42 PM	Bypass valve opened
11/13/2010	1:46:42 PM	Helium MFC set to  0.000000
11/13/2010	1:46:42 PM	H2 MFC set to  0.000000
11/13/2010	1:46:42 PM	BCl3 MFC set to  0.000000
11/13/2010	1:46:42 PM	PHl3 MFC set to  0.000000
11/13/2010	1:46:42 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:46:42 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:46:42 PM	Tube furnace set to 0
11/13/2010	1:47:42 PM	H2 valve closed
11/13/2010	1:47:42 PM	BCl3 valve closed
11/13/2010	1:47:42 PM	PH3 valve closed
11/13/2010	1:47:42 PM	SiCl4 pre valve closed
11/13/2010	1:47:42 PM	SiCl4 post valve closed
11/13/2010	1:47:42 PM	Bubbler valve closed
11/13/2010	1:47:42 PM	Helium valve opened
11/13/2010	1:47:42 PM	Main Vac valve opened
11/13/2010	1:47:42 PM	Bypass valve opened
11/13/2010	1:47:43 PM	Helium MFC set to  100.000000
11/13/2010	1:47:43 PM	H2 MFC set to  0.000000
11/13/2010	1:47:43 PM	BCl3 MFC set to  0.000000
11/13/2010	1:47:43 PM	PHl3 MFC set to  0.000000
11/13/2010	1:47:43 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:47:43 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:47:43 PM	Tube furnace set to 0
11/13/2010	1:48:43 PM	Helium valve closed
11/13/2010	1:48:43 PM	H2 valve closed
11/13/2010	1:48:43 PM	BCl3 valve closed
11/13/2010	1:48:43 PM	PH3 valve closed
11/13/2010	1:48:43 PM	SiCl4 pre valve closed
11/13/2010	1:48:43 PM	SiCl4 post valve closed
11/13/2010	1:48:43 PM	Bubbler valve closed
11/13/2010	1:48:43 PM	Main Vac valve opened
11/13/2010	1:48:43 PM	Bypass valve opened
11/13/2010	1:48:43 PM	Helium MFC set to  0.000000
11/13/2010	1:48:43 PM	H2 MFC set to  0.000000
11/13/2010	1:48:43 PM	BCl3 MFC set to  0.000000
11/13/2010	1:48:43 PM	PHl3 MFC set to  0.000000
11/13/2010	1:48:43 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:48:43 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:48:43 PM	Tube furnace set to 0
11/13/2010	1:49:43 PM	H2 valve closed
11/13/2010	1:49:43 PM	BCl3 valve closed
11/13/2010	1:49:43 PM	PH3 valve closed
11/13/2010	1:49:43 PM	SiCl4 pre valve closed
11/13/2010	1:49:43 PM	SiCl4 post valve closed
11/13/2010	1:49:43 PM	Bubbler valve closed
11/13/2010	1:49:43 PM	Helium valve opened
11/13/2010	1:49:43 PM	Main Vac valve opened
11/13/2010	1:49:43 PM	Bypass valve opened
11/13/2010	1:49:43 PM	Helium MFC set to  100.000000
11/13/2010	1:49:43 PM	H2 MFC set to  0.000000
11/13/2010	1:49:43 PM	BCl3 MFC set to  0.000000
11/13/2010	1:49:43 PM	PHl3 MFC set to  0.000000
11/13/2010	1:49:43 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:49:43 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:49:43 PM	Tube furnace set to 0
11/13/2010	1:50:43 PM	Helium valve closed
11/13/2010	1:50:43 PM	H2 valve closed
11/13/2010	1:50:43 PM	BCl3 valve closed
11/13/2010	1:50:43 PM	PH3 valve closed
11/13/2010	1:50:43 PM	SiCl4 pre valve closed
11/13/2010	1:50:43 PM	SiCl4 post valve closed
11/13/2010	1:50:43 PM	Bubbler valve closed
11/13/2010	1:50:43 PM	Main Vac valve opened
11/13/2010	1:50:43 PM	Bypass valve opened
11/13/2010	1:50:43 PM	Helium MFC set to  0.000000
11/13/2010	1:50:43 PM	H2 MFC set to  0.000000
11/13/2010	1:50:43 PM	BCl3 MFC set to  0.000000
11/13/2010	1:50:43 PM	PHl3 MFC set to  0.000000
11/13/2010	1:50:43 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:50:43 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:50:43 PM	Tube furnace set to 0
11/13/2010	1:51:43 PM	H2 valve closed
11/13/2010	1:51:43 PM	BCl3 valve closed
11/13/2010	1:51:43 PM	PH3 valve closed
11/13/2010	1:51:43 PM	SiCl4 pre valve closed
11/13/2010	1:51:43 PM	SiCl4 post valve closed
11/13/2010	1:51:43 PM	Bubbler valve closed
11/13/2010	1:51:43 PM	Helium valve opened
11/13/2010	1:51:43 PM	Main Vac valve opened
11/13/2010	1:51:43 PM	Bypass valve opened
11/13/2010	1:51:43 PM	Helium MFC set to  100.000000
11/13/2010	1:51:43 PM	H2 MFC set to  0.000000
11/13/2010	1:51:43 PM	BCl3 MFC set to  0.000000
11/13/2010	1:51:43 PM	PHl3 MFC set to  0.000000
11/13/2010	1:51:43 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:51:43 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:51:43 PM	Tube furnace set to 0
11/13/2010	1:52:43 PM	Helium valve closed
11/13/2010	1:52:43 PM	H2 valve closed
11/13/2010	1:52:43 PM	BCl3 valve closed
11/13/2010	1:52:43 PM	PH3 valve closed
11/13/2010	1:52:43 PM	SiCl4 pre valve closed
11/13/2010	1:52:43 PM	SiCl4 post valve closed
11/13/2010	1:52:43 PM	Bubbler valve closed
11/13/2010	1:52:43 PM	Main Vac valve opened
11/13/2010	1:52:43 PM	Bypass valve opened
11/13/2010	1:52:43 PM	Helium MFC set to  0.000000
11/13/2010	1:52:43 PM	H2 MFC set to  0.000000
11/13/2010	1:52:43 PM	BCl3 MFC set to  0.000000
11/13/2010	1:52:43 PM	PHl3 MFC set to  0.000000
11/13/2010	1:52:43 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:52:43 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:52:44 PM	Tube furnace set to 0
11/13/2010	1:53:22 PM	H2 valve closed
11/13/2010	1:53:22 PM	BCl3 valve closed
11/13/2010	1:53:22 PM	PH3 valve closed
11/13/2010	1:53:22 PM	SiCl4 pre valve closed
11/13/2010	1:53:22 PM	SiCl4 post valve closed
11/13/2010	1:53:22 PM	Bubbler valve closed
11/13/2010	1:53:22 PM	Helium valve opened
11/13/2010	1:53:22 PM	Main Vac valve opened
11/13/2010	1:53:22 PM	Bypass valve opened
11/13/2010	1:53:22 PM	Helium MFC set to  100.000000
11/13/2010	1:53:22 PM	H2 MFC set to  0.000000
11/13/2010	1:53:22 PM	BCl3 MFC set to  0.000000
11/13/2010	1:53:22 PM	PHl3 MFC set to  0.000000
11/13/2010	1:53:22 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:53:22 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:53:22 PM	Tube furnace set to 0
11/13/2010	1:53:23 PM	Helium valve closed
11/13/2010	1:53:23 PM	H2 valve closed
11/13/2010	1:53:23 PM	BCl3 valve closed
11/13/2010	1:53:23 PM	PH3 valve closed
11/13/2010	1:53:23 PM	SiCl4 pre valve closed
11/13/2010	1:53:23 PM	SiCl4 post valve closed
11/13/2010	1:53:23 PM	Bubbler valve closed
11/13/2010	1:53:23 PM	Main Vac valve opened
11/13/2010	1:53:23 PM	Bypass valve opened
11/13/2010	1:53:23 PM	Helium MFC set to  0.000000
11/13/2010	1:53:23 PM	H2 MFC set to  0.000000
11/13/2010	1:53:23 PM	BCl3 MFC set to  0.000000
11/13/2010	1:53:23 PM	PHl3 MFC set to  0.000000
11/13/2010	1:53:23 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:53:23 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:53:23 PM	Tube furnace set to 0
11/13/2010	1:53:24 PM	Run finished at 1:53 PM
11/13/2010	1:53:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/13/2010	1:53:31 PM	Helium MFC set to  100.000000
11/13/2010	1:53:41 PM	Helium valve opened
11/13/2010	1:59:03 PM	Helium valve closed
11/13/2010	1:59:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	1:59:05 PM	Recipe started at 1:59 PM
11/13/2010	1:59:05 PM	Helium valve closed
11/13/2010	1:59:05 PM	H2 valve closed
11/13/2010	1:59:05 PM	BCl3 valve closed
11/13/2010	1:59:05 PM	PH3 valve closed
11/13/2010	1:59:05 PM	SiCl4 pre valve closed
11/13/2010	1:59:05 PM	SiCl4 post valve closed
11/13/2010	1:59:05 PM	Main Vac valve closed
11/13/2010	1:59:05 PM	Bubbler valve closed
11/13/2010	1:59:05 PM	Bypass valve opened
11/13/2010	1:59:05 PM	Helium MFC set to  0.000000
11/13/2010	1:59:05 PM	H2 MFC set to  0.000000
11/13/2010	1:59:05 PM	BCl3 MFC set to  0.000000
11/13/2010	1:59:05 PM	PHl3 MFC set to  0.000000
11/13/2010	1:59:05 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:59:05 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:59:05 PM	Tube furnace set to 0
11/13/2010	1:59:05 PM	Helium valve closed
11/13/2010	1:59:05 PM	H2 valve closed
11/13/2010	1:59:05 PM	BCl3 valve closed
11/13/2010	1:59:05 PM	PH3 valve closed
11/13/2010	1:59:05 PM	SiCl4 pre valve closed
11/13/2010	1:59:05 PM	SiCl4 post valve closed
11/13/2010	1:59:05 PM	Bubbler valve closed
11/13/2010	1:59:05 PM	Main Vac valve opened
11/13/2010	1:59:05 PM	Bypass valve opened
11/13/2010	1:59:05 PM	Helium MFC set to  0.000000
11/13/2010	1:59:05 PM	H2 MFC set to  0.000000
11/13/2010	1:59:05 PM	BCl3 MFC set to  0.000000
11/13/2010	1:59:05 PM	PHl3 MFC set to  0.000000
11/13/2010	1:59:05 PM	SiCl4 MFC set to  0.000000
11/13/2010	1:59:05 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	1:59:05 PM	Tube furnace set to 0
11/13/2010	1:59:06 PM	Run finished at 1:59 PM
11/13/2010	1:59:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	1:59:51 PM	Helium MFC set to  100.000000
11/13/2010	1:59:52 PM	Helium valve opened
11/13/2010	2:02:28 PM	Helium valve closed
11/13/2010	2:02:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	2:02:30 PM	Recipe started at 2:02 PM
11/13/2010	2:02:30 PM	Helium valve closed
11/13/2010	2:02:30 PM	H2 valve closed
11/13/2010	2:02:30 PM	BCl3 valve closed
11/13/2010	2:02:30 PM	PH3 valve closed
11/13/2010	2:02:30 PM	SiCl4 pre valve closed
11/13/2010	2:02:30 PM	SiCl4 post valve closed
11/13/2010	2:02:30 PM	Main Vac valve closed
11/13/2010	2:02:30 PM	Bubbler valve closed
11/13/2010	2:02:30 PM	Bypass valve opened
11/13/2010	2:02:30 PM	Helium MFC set to  0.000000
11/13/2010	2:02:30 PM	H2 MFC set to  0.000000
11/13/2010	2:02:30 PM	BCl3 MFC set to  0.000000
11/13/2010	2:02:30 PM	PHl3 MFC set to  0.000000
11/13/2010	2:02:30 PM	SiCl4 MFC set to  0.000000
11/13/2010	2:02:30 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	2:02:30 PM	Tube furnace set to 0
11/13/2010	2:02:31 PM	Helium valve closed
11/13/2010	2:02:31 PM	H2 valve closed
11/13/2010	2:02:31 PM	BCl3 valve closed
11/13/2010	2:02:31 PM	PH3 valve closed
11/13/2010	2:02:31 PM	SiCl4 pre valve closed
11/13/2010	2:02:31 PM	SiCl4 post valve closed
11/13/2010	2:02:31 PM	Bubbler valve closed
11/13/2010	2:02:31 PM	Main Vac valve opened
11/13/2010	2:02:31 PM	Bypass valve opened
11/13/2010	2:02:31 PM	Helium MFC set to  0.000000
11/13/2010	2:02:31 PM	H2 MFC set to  0.000000
11/13/2010	2:02:31 PM	BCl3 MFC set to  0.000000
11/13/2010	2:02:31 PM	PHl3 MFC set to  0.000000
11/13/2010	2:02:31 PM	SiCl4 MFC set to  0.000000
11/13/2010	2:02:31 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	2:02:31 PM	Tube furnace set to 0
11/13/2010	2:02:31 PM	Run finished at 2:02 PM
11/13/2010	2:02:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	2:03:19 PM	Recipe started at 2:03 PM
11/13/2010	2:03:19 PM	Helium valve closed
11/13/2010	2:03:19 PM	BCl3 valve closed
11/13/2010	2:03:19 PM	PH3 valve closed
11/13/2010	2:03:19 PM	SiCl4 pre valve closed
11/13/2010	2:03:19 PM	SiCl4 post valve closed
11/13/2010	2:03:19 PM	Main Vac valve closed
11/13/2010	2:03:19 PM	Bypass valve closed
11/13/2010	2:03:19 PM	Bubbler valve closed
11/13/2010	2:03:19 PM	H2 valve opened
11/13/2010	2:03:19 PM	Helium MFC set to  0.000000
11/13/2010	2:03:19 PM	H2 MFC set to  500.000000
11/13/2010	2:03:19 PM	BCl3 MFC set to  0.000000
11/13/2010	2:03:19 PM	PHl3 MFC set to  0.000000
11/13/2010	2:03:19 PM	SiCl4 MFC set to  0.000000
11/13/2010	2:03:19 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	2:03:19 PM	Tube furnace set to 1000
11/13/2010	2:04:41 PM	Helium valve closed
11/13/2010	2:04:41 PM	BCl3 valve closed
11/13/2010	2:04:41 PM	PH3 valve closed
11/13/2010	2:04:41 PM	SiCl4 pre valve closed
11/13/2010	2:04:41 PM	SiCl4 post valve closed
11/13/2010	2:04:41 PM	Main Vac valve closed
11/13/2010	2:04:41 PM	Bypass valve closed
11/13/2010	2:04:41 PM	H2 valve opened
11/13/2010	2:04:41 PM	Bubbler valve opened
11/13/2010	2:04:41 PM	Helium MFC set to  0.000000
11/13/2010	2:04:41 PM	H2 MFC set to  500.000000
11/13/2010	2:04:41 PM	BCl3 MFC set to  0.000000
11/13/2010	2:04:41 PM	PHl3 MFC set to  0.000000
11/13/2010	2:04:41 PM	SiCl4 MFC set to  0.000000
11/13/2010	2:04:41 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	2:04:41 PM	Tube furnace set to 1000
11/13/2010	2:24:41 PM	Helium valve closed
11/13/2010	2:24:41 PM	PH3 valve closed
11/13/2010	2:24:41 PM	Main Vac valve closed
11/13/2010	2:24:41 PM	Bypass valve closed
11/13/2010	2:24:41 PM	H2 valve opened
11/13/2010	2:24:41 PM	BCl3 valve opened
11/13/2010	2:24:41 PM	SiCl4 pre valve opened
11/13/2010	2:24:41 PM	SiCl4 post valve opened
11/13/2010	2:24:41 PM	Bubbler valve opened
11/13/2010	2:24:41 PM	Helium MFC set to  0.000000
11/13/2010	2:24:41 PM	H2 MFC set to  500.000000
11/13/2010	2:24:41 PM	BCl3 MFC set to  12.000000
11/13/2010	2:24:41 PM	PHl3 MFC set to  0.000000
11/13/2010	2:24:41 PM	SiCl4 MFC set to  50.000000
11/13/2010	2:24:41 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	2:24:41 PM	Tube furnace set to 1000
11/13/2010	2:39:41 PM	Helium valve closed
11/13/2010	2:39:41 PM	BCl3 valve closed
11/13/2010	2:39:41 PM	PH3 valve closed
11/13/2010	2:39:41 PM	SiCl4 pre valve closed
11/13/2010	2:39:41 PM	SiCl4 post valve closed
11/13/2010	2:39:41 PM	Main Vac valve closed
11/13/2010	2:39:41 PM	Bypass valve closed
11/13/2010	2:39:41 PM	H2 valve opened
11/13/2010	2:39:41 PM	Bubbler valve opened
11/13/2010	2:39:41 PM	Helium MFC set to  0.000000
11/13/2010	2:39:41 PM	H2 MFC set to  500.000000
11/13/2010	2:39:41 PM	BCl3 MFC set to  0.000000
11/13/2010	2:39:41 PM	PHl3 MFC set to  0.000000
11/13/2010	2:39:41 PM	SiCl4 MFC set to  0.000000
11/13/2010	2:39:41 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	2:39:41 PM	Tube furnace set to 750
11/13/2010	2:59:41 PM	H2 valve closed
11/13/2010	2:59:41 PM	BCl3 valve closed
11/13/2010	2:59:41 PM	PH3 valve closed
11/13/2010	2:59:41 PM	SiCl4 pre valve closed
11/13/2010	2:59:41 PM	SiCl4 post valve closed
11/13/2010	2:59:41 PM	Main Vac valve closed
11/13/2010	2:59:41 PM	Bypass valve closed
11/13/2010	2:59:41 PM	Helium valve opened
11/13/2010	2:59:41 PM	Bubbler valve opened
11/13/2010	2:59:41 PM	Helium MFC set to  500.000000
11/13/2010	2:59:41 PM	H2 MFC set to  0.000000
11/13/2010	2:59:41 PM	BCl3 MFC set to  0.000000
11/13/2010	2:59:41 PM	PHl3 MFC set to  0.000000
11/13/2010	2:59:41 PM	SiCl4 MFC set to  0.000000
11/13/2010	2:59:41 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	2:59:41 PM	Tube furnace set to 0
11/13/2010	3:16:15 PM	Helium valve closed
11/13/2010	3:16:15 PM	H2 valve closed
11/13/2010	3:16:15 PM	BCl3 valve closed
11/13/2010	3:16:15 PM	PH3 valve closed
11/13/2010	3:16:15 PM	SiCl4 pre valve closed
11/13/2010	3:16:15 PM	SiCl4 post valve closed
11/13/2010	3:16:15 PM	Main Vac valve closed
11/13/2010	3:16:15 PM	Bypass valve closed
11/13/2010	3:16:15 PM	Bubbler valve closed
11/13/2010	3:16:15 PM	Helium MFC set to  0.000000
11/13/2010	3:16:15 PM	H2 MFC set to  0.000000
11/13/2010	3:16:15 PM	BCl3 MFC set to  0.000000
11/13/2010	3:16:15 PM	PHl3 MFC set to  0.000000
11/13/2010	3:16:15 PM	SiCl4 MFC set to  0.000000
11/13/2010	3:16:15 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	3:16:15 PM	Tube furnace set to 0
11/13/2010	3:16:16 PM	Run finished at 3:16 PM
11/13/2010	3:16:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	3:16:20 PM	Recipe started at 3:16 PM
11/13/2010	3:16:20 PM	H2 valve closed
11/13/2010	3:16:20 PM	BCl3 valve closed
11/13/2010	3:16:20 PM	PH3 valve closed
11/13/2010	3:16:20 PM	SiCl4 pre valve closed
11/13/2010	3:16:20 PM	SiCl4 post valve closed
11/13/2010	3:16:20 PM	Main Vac valve closed
11/13/2010	3:16:20 PM	Bypass valve closed
11/13/2010	3:16:20 PM	Bubbler valve closed
11/13/2010	3:16:20 PM	Helium valve opened
11/13/2010	3:16:20 PM	Helium MFC set to  500.000000
11/13/2010	3:16:20 PM	H2 MFC set to  0.000000
11/13/2010	3:16:20 PM	BCl3 MFC set to  0.000000
11/13/2010	3:16:20 PM	PHl3 MFC set to  0.000000
11/13/2010	3:16:20 PM	SiCl4 MFC set to  0.000000
11/13/2010	3:16:20 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	3:16:20 PM	Tube furnace set to 0
11/13/2010	3:16:20 PM	Helium valve closed
11/13/2010	3:16:20 PM	H2 valve closed
11/13/2010	3:16:20 PM	BCl3 valve closed
11/13/2010	3:16:20 PM	PH3 valve closed
11/13/2010	3:16:20 PM	SiCl4 pre valve closed
11/13/2010	3:16:20 PM	SiCl4 post valve closed
11/13/2010	3:16:20 PM	Main Vac valve closed
11/13/2010	3:16:20 PM	Bypass valve closed
11/13/2010	3:16:20 PM	Bubbler valve closed
11/13/2010	3:16:20 PM	Helium MFC set to  0.000000
11/13/2010	3:16:20 PM	H2 MFC set to  0.000000
11/13/2010	3:16:20 PM	BCl3 MFC set to  0.000000
11/13/2010	3:16:20 PM	PHl3 MFC set to  0.000000
11/13/2010	3:16:20 PM	SiCl4 MFC set to  0.000000
11/13/2010	3:16:20 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	3:16:21 PM	Tube furnace set to 0
11/13/2010	3:16:21 PM	Run finished at 3:16 PM
11/13/2010	3:16:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	3:20:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	3:20:15 PM	Recipe started at 3:20 PM
11/13/2010	3:20:16 PM	Helium valve closed
11/13/2010	3:20:16 PM	H2 valve closed
11/13/2010	3:20:16 PM	BCl3 valve closed
11/13/2010	3:20:16 PM	PH3 valve closed
11/13/2010	3:20:16 PM	SiCl4 pre valve closed
11/13/2010	3:20:16 PM	SiCl4 post valve closed
11/13/2010	3:20:16 PM	Main Vac valve closed
11/13/2010	3:20:16 PM	Bubbler valve closed
11/13/2010	3:20:16 PM	Bypass valve opened
11/13/2010	3:20:16 PM	Helium MFC set to  0.000000
11/13/2010	3:20:16 PM	H2 MFC set to  0.000000
11/13/2010	3:20:16 PM	BCl3 MFC set to  0.000000
11/13/2010	3:20:16 PM	PHl3 MFC set to  0.000000
11/13/2010	3:20:16 PM	SiCl4 MFC set to  0.000000
11/13/2010	3:20:16 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	3:20:16 PM	Tube furnace set to 0
11/13/2010	3:21:06 PM	Helium valve closed
11/13/2010	3:21:06 PM	H2 valve closed
11/13/2010	3:21:06 PM	BCl3 valve closed
11/13/2010	3:21:06 PM	PH3 valve closed
11/13/2010	3:21:06 PM	SiCl4 pre valve closed
11/13/2010	3:21:06 PM	SiCl4 post valve closed
11/13/2010	3:21:06 PM	Bubbler valve closed
11/13/2010	3:21:06 PM	Main Vac valve opened
11/13/2010	3:21:06 PM	Bypass valve opened
11/13/2010	3:21:06 PM	Helium MFC set to  0.000000
11/13/2010	3:21:06 PM	H2 MFC set to  0.000000
11/13/2010	3:21:06 PM	BCl3 MFC set to  0.000000
11/13/2010	3:21:06 PM	PHl3 MFC set to  0.000000
11/13/2010	3:21:06 PM	SiCl4 MFC set to  0.000000
11/13/2010	3:21:06 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	3:21:06 PM	Tube furnace set to 0
11/13/2010	3:21:07 PM	Run finished at 3:21 PM
11/13/2010	3:21:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	3:21:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	3:21:26 PM	Recipe started at 3:21 PM
11/13/2010	3:21:26 PM	H2 valve closed
11/13/2010	3:21:26 PM	BCl3 valve closed
11/13/2010	3:21:26 PM	PH3 valve closed
11/13/2010	3:21:26 PM	SiCl4 pre valve closed
11/13/2010	3:21:26 PM	SiCl4 post valve closed
11/13/2010	3:21:26 PM	Main Vac valve closed
11/13/2010	3:21:26 PM	Bypass valve closed
11/13/2010	3:21:26 PM	Bubbler valve closed
11/13/2010	3:21:26 PM	Helium valve opened
11/13/2010	3:21:26 PM	Helium MFC set to  500.000000
11/13/2010	3:21:26 PM	H2 MFC set to  0.000000
11/13/2010	3:21:26 PM	BCl3 MFC set to  0.000000
11/13/2010	3:21:26 PM	PHl3 MFC set to  0.000000
11/13/2010	3:21:26 PM	SiCl4 MFC set to  0.000000
11/13/2010	3:21:26 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	3:21:26 PM	Tube furnace set to 0
11/13/2010	3:22:33 PM	Helium valve closed
11/13/2010	3:22:33 PM	H2 valve closed
11/13/2010	3:22:33 PM	BCl3 valve closed
11/13/2010	3:22:33 PM	PH3 valve closed
11/13/2010	3:22:33 PM	SiCl4 pre valve closed
11/13/2010	3:22:33 PM	SiCl4 post valve closed
11/13/2010	3:22:33 PM	Main Vac valve closed
11/13/2010	3:22:33 PM	Bypass valve closed
11/13/2010	3:22:33 PM	Bubbler valve closed
11/13/2010	3:22:33 PM	Helium MFC set to  0.000000
11/13/2010	3:22:33 PM	H2 MFC set to  0.000000
11/13/2010	3:22:33 PM	BCl3 MFC set to  0.000000
11/13/2010	3:22:33 PM	PHl3 MFC set to  0.000000
11/13/2010	3:22:33 PM	SiCl4 MFC set to  0.000000
11/13/2010	3:22:33 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	3:22:33 PM	Tube furnace set to 0
11/13/2010	3:22:34 PM	Run finished at 3:22 PM
11/13/2010	3:22:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	3:23:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	3:23:51 PM	Recipe started at 3:23 PM
11/13/2010	3:23:52 PM	Helium valve closed
11/13/2010	3:23:52 PM	H2 valve closed
11/13/2010	3:23:52 PM	BCl3 valve closed
11/13/2010	3:23:52 PM	PH3 valve closed
11/13/2010	3:23:52 PM	SiCl4 pre valve closed
11/13/2010	3:23:52 PM	SiCl4 post valve closed
11/13/2010	3:23:52 PM	Main Vac valve closed
11/13/2010	3:23:52 PM	Bubbler valve closed
11/13/2010	3:23:52 PM	Bypass valve opened
11/13/2010	3:23:52 PM	Helium MFC set to  0.000000
11/13/2010	3:23:52 PM	H2 MFC set to  0.000000
11/13/2010	3:23:52 PM	BCl3 MFC set to  0.000000
11/13/2010	3:23:52 PM	PHl3 MFC set to  0.000000
11/13/2010	3:23:52 PM	SiCl4 MFC set to  0.000000
11/13/2010	3:23:52 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	3:23:52 PM	Tube furnace set to 0
11/13/2010	3:24:32 PM	Helium valve closed
11/13/2010	3:24:32 PM	H2 valve closed
11/13/2010	3:24:32 PM	BCl3 valve closed
11/13/2010	3:24:32 PM	PH3 valve closed
11/13/2010	3:24:32 PM	SiCl4 pre valve closed
11/13/2010	3:24:32 PM	SiCl4 post valve closed
11/13/2010	3:24:32 PM	Bubbler valve closed
11/13/2010	3:24:32 PM	Main Vac valve opened
11/13/2010	3:24:32 PM	Bypass valve opened
11/13/2010	3:24:32 PM	Helium MFC set to  0.000000
11/13/2010	3:24:32 PM	H2 MFC set to  0.000000
11/13/2010	3:24:32 PM	BCl3 MFC set to  0.000000
11/13/2010	3:24:32 PM	PHl3 MFC set to  0.000000
11/13/2010	3:24:32 PM	SiCl4 MFC set to  0.000000
11/13/2010	3:24:32 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	3:24:32 PM	Tube furnace set to 0
11/13/2010	3:24:33 PM	Run finished at 3:24 PM
11/13/2010	3:24:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	3:24:59 PM	Helium MFC set to  100.000000
11/13/2010	3:25:01 PM	Helium valve opened
11/13/2010	3:40:55 PM	Helium valve closed
11/13/2010	3:41:03 PM	Helium MFC set to  0.000000
11/13/2010	3:41:42 PM	Helium MFC set to  100.000000
11/13/2010	3:41:43 PM	Helium valve opened
11/13/2010	3:45:31 PM	Helium valve closed
11/13/2010	3:45:34 PM	Helium MFC set to  0.000000
11/13/2010	3:46:15 PM	Helium MFC set to  100.000000
11/13/2010	3:46:16 PM	Helium valve opened
11/13/2010	3:55:18 PM	Helium valve closed
11/13/2010	3:55:20 PM	Helium MFC set to  0.000000
11/13/2010	3:56:10 PM	Recipe started at 3:56 PM
11/13/2010	3:56:10 PM	Helium valve closed
11/13/2010	3:56:10 PM	BCl3 valve closed
11/13/2010	3:56:10 PM	PH3 valve closed
11/13/2010	3:56:10 PM	SiCl4 pre valve closed
11/13/2010	3:56:10 PM	SiCl4 post valve closed
11/13/2010	3:56:10 PM	Main Vac valve closed
11/13/2010	3:56:10 PM	Bypass valve closed
11/13/2010	3:56:10 PM	Bubbler valve closed
11/13/2010	3:56:10 PM	H2 valve opened
11/13/2010	3:56:10 PM	Helium MFC set to  0.000000
11/13/2010	3:56:10 PM	H2 MFC set to  500.000000
11/13/2010	3:56:10 PM	BCl3 MFC set to  0.000000
11/13/2010	3:56:10 PM	PHl3 MFC set to  0.000000
11/13/2010	3:56:10 PM	SiCl4 MFC set to  0.000000
11/13/2010	3:56:10 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	3:56:11 PM	Tube furnace set to 1000
11/13/2010	3:57:31 PM	Helium valve closed
11/13/2010	3:57:31 PM	BCl3 valve closed
11/13/2010	3:57:31 PM	PH3 valve closed
11/13/2010	3:57:31 PM	SiCl4 pre valve closed
11/13/2010	3:57:31 PM	SiCl4 post valve closed
11/13/2010	3:57:31 PM	Main Vac valve closed
11/13/2010	3:57:31 PM	Bypass valve closed
11/13/2010	3:57:31 PM	H2 valve opened
11/13/2010	3:57:31 PM	Bubbler valve opened
11/13/2010	3:57:31 PM	Helium MFC set to  0.000000
11/13/2010	3:57:31 PM	H2 MFC set to  500.000000
11/13/2010	3:57:31 PM	BCl3 MFC set to  0.000000
11/13/2010	3:57:31 PM	PHl3 MFC set to  0.000000
11/13/2010	3:57:31 PM	SiCl4 MFC set to  0.000000
11/13/2010	3:57:31 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	3:57:31 PM	Tube furnace set to 1000
11/13/2010	4:17:31 PM	Helium valve closed
11/13/2010	4:17:31 PM	PH3 valve closed
11/13/2010	4:17:31 PM	Main Vac valve closed
11/13/2010	4:17:31 PM	Bypass valve closed
11/13/2010	4:17:31 PM	H2 valve opened
11/13/2010	4:17:31 PM	BCl3 valve opened
11/13/2010	4:17:31 PM	SiCl4 pre valve opened
11/13/2010	4:17:31 PM	SiCl4 post valve opened
11/13/2010	4:17:31 PM	Bubbler valve opened
11/13/2010	4:17:31 PM	Helium MFC set to  0.000000
11/13/2010	4:17:31 PM	H2 MFC set to  500.000000
11/13/2010	4:17:31 PM	BCl3 MFC set to  12.000000
11/13/2010	4:17:31 PM	PHl3 MFC set to  0.000000
11/13/2010	4:17:31 PM	SiCl4 MFC set to  50.000000
11/13/2010	4:17:31 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	4:17:31 PM	Tube furnace set to 1000
11/13/2010	4:30:51 PM	Helium valve closed
11/13/2010	4:30:51 PM	BCl3 valve closed
11/13/2010	4:30:51 PM	PH3 valve closed
11/13/2010	4:30:51 PM	SiCl4 pre valve closed
11/13/2010	4:30:51 PM	SiCl4 post valve closed
11/13/2010	4:30:51 PM	Main Vac valve closed
11/13/2010	4:30:51 PM	Bypass valve closed
11/13/2010	4:30:51 PM	H2 valve opened
11/13/2010	4:30:51 PM	Bubbler valve opened
11/13/2010	4:30:51 PM	Helium MFC set to  0.000000
11/13/2010	4:30:51 PM	H2 MFC set to  500.000000
11/13/2010	4:30:51 PM	BCl3 MFC set to  0.000000
11/13/2010	4:30:51 PM	PHl3 MFC set to  0.000000
11/13/2010	4:30:51 PM	SiCl4 MFC set to  0.000000
11/13/2010	4:30:51 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	4:30:52 PM	Tube furnace set to 750
11/13/2010	4:50:52 PM	H2 valve closed
11/13/2010	4:50:52 PM	BCl3 valve closed
11/13/2010	4:50:52 PM	PH3 valve closed
11/13/2010	4:50:52 PM	SiCl4 pre valve closed
11/13/2010	4:50:52 PM	SiCl4 post valve closed
11/13/2010	4:50:52 PM	Main Vac valve closed
11/13/2010	4:50:52 PM	Bypass valve closed
11/13/2010	4:50:52 PM	Helium valve opened
11/13/2010	4:50:52 PM	Bubbler valve opened
11/13/2010	4:50:52 PM	Helium MFC set to  500.000000
11/13/2010	4:50:52 PM	H2 MFC set to  0.000000
11/13/2010	4:50:52 PM	BCl3 MFC set to  0.000000
11/13/2010	4:50:52 PM	PHl3 MFC set to  0.000000
11/13/2010	4:50:52 PM	SiCl4 MFC set to  0.000000
11/13/2010	4:50:52 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	4:50:52 PM	Tube furnace set to 0
11/13/2010	4:56:20 PM	Run aborted at 4:56 PM
11/13/2010	4:56:20 PM	Helium valve closed
11/13/2010	4:56:20 PM	H2 valve closed
11/13/2010	4:56:20 PM	BCl3 valve closed
11/13/2010	4:56:20 PM	PH3 valve closed
11/13/2010	4:56:20 PM	SiCl4 pre valve closed
11/13/2010	4:56:20 PM	SiCl4 post valve closed
11/13/2010	4:56:20 PM	Bypass valve closed
11/13/2010	4:56:20 PM	Main Vac valve closed
11/13/2010	4:56:20 PM	Bubbler valve closed
11/13/2010	4:56:20 PM	Helium MFC set to  0.000000
11/13/2010	4:56:20 PM	H2 MFC set to  0.000000
11/13/2010	4:56:20 PM	BCl3 MFC set to  0.000000
11/13/2010	4:56:20 PM	PHl3 MFC set to  0.000000
11/13/2010	4:56:20 PM	SiCl4 MFC set to  0.000000
11/13/2010	4:56:21 PM	Tube furnace set to 0
11/13/2010	4:56:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	4:56:22 PM	Recipe started at 4:56 PM
11/13/2010	4:56:22 PM	H2 valve closed
11/13/2010	4:56:22 PM	BCl3 valve closed
11/13/2010	4:56:22 PM	PH3 valve closed
11/13/2010	4:56:22 PM	SiCl4 pre valve closed
11/13/2010	4:56:22 PM	SiCl4 post valve closed
11/13/2010	4:56:22 PM	Main Vac valve closed
11/13/2010	4:56:22 PM	Bypass valve closed
11/13/2010	4:56:22 PM	Bubbler valve closed
11/13/2010	4:56:22 PM	Helium valve opened
11/13/2010	4:56:22 PM	Helium MFC set to  500.000000
11/13/2010	4:56:22 PM	H2 MFC set to  0.000000
11/13/2010	4:56:22 PM	BCl3 MFC set to  0.000000
11/13/2010	4:56:22 PM	PHl3 MFC set to  0.000000
11/13/2010	4:56:22 PM	SiCl4 MFC set to  0.000000
11/13/2010	4:56:22 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	4:56:22 PM	Tube furnace set to 0
11/13/2010	4:56:22 PM	Helium valve closed
11/13/2010	4:56:22 PM	H2 valve closed
11/13/2010	4:56:22 PM	BCl3 valve closed
11/13/2010	4:56:22 PM	PH3 valve closed
11/13/2010	4:56:23 PM	SiCl4 pre valve closed
11/13/2010	4:56:23 PM	SiCl4 post valve closed
11/13/2010	4:56:23 PM	Main Vac valve closed
11/13/2010	4:56:23 PM	Bypass valve closed
11/13/2010	4:56:23 PM	Bubbler valve closed
11/13/2010	4:56:23 PM	Helium MFC set to  0.000000
11/13/2010	4:56:23 PM	H2 MFC set to  0.000000
11/13/2010	4:56:23 PM	BCl3 MFC set to  0.000000
11/13/2010	4:56:23 PM	PHl3 MFC set to  0.000000
11/13/2010	4:56:23 PM	SiCl4 MFC set to  0.000000
11/13/2010	4:56:23 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	4:56:23 PM	Tube furnace set to 0
11/13/2010	4:56:23 PM	Run finished at 4:56 PM
11/13/2010	4:56:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	5:04:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	5:04:54 PM	Recipe started at 5:04 PM
11/13/2010	5:04:54 PM	Helium valve closed
11/13/2010	5:04:54 PM	H2 valve closed
11/13/2010	5:04:54 PM	BCl3 valve closed
11/13/2010	5:04:54 PM	PH3 valve closed
11/13/2010	5:04:54 PM	SiCl4 pre valve closed
11/13/2010	5:04:54 PM	SiCl4 post valve closed
11/13/2010	5:04:54 PM	Main Vac valve closed
11/13/2010	5:04:54 PM	Bubbler valve closed
11/13/2010	5:04:54 PM	Bypass valve opened
11/13/2010	5:04:54 PM	Helium MFC set to  0.000000
11/13/2010	5:04:54 PM	H2 MFC set to  0.000000
11/13/2010	5:04:54 PM	BCl3 MFC set to  0.000000
11/13/2010	5:04:54 PM	PHl3 MFC set to  0.000000
11/13/2010	5:04:54 PM	SiCl4 MFC set to  0.000000
11/13/2010	5:04:54 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	5:04:54 PM	Tube furnace set to 0
11/13/2010	5:05:35 PM	Run aborted at 5:05 PM
11/13/2010	5:05:35 PM	Helium valve closed
11/13/2010	5:05:35 PM	H2 valve closed
11/13/2010	5:05:35 PM	BCl3 valve closed
11/13/2010	5:05:35 PM	PH3 valve closed
11/13/2010	5:05:35 PM	SiCl4 pre valve closed
11/13/2010	5:05:35 PM	SiCl4 post valve closed
11/13/2010	5:05:35 PM	Bypass valve closed
11/13/2010	5:05:35 PM	Main Vac valve closed
11/13/2010	5:05:35 PM	Bubbler valve closed
11/13/2010	5:05:35 PM	Helium MFC set to  0.000000
11/13/2010	5:05:35 PM	H2 MFC set to  0.000000
11/13/2010	5:05:35 PM	BCl3 MFC set to  0.000000
11/13/2010	5:05:35 PM	PHl3 MFC set to  0.000000
11/13/2010	5:05:35 PM	SiCl4 MFC set to  0.000000
11/13/2010	5:05:35 PM	Tube furnace set to 0
11/13/2010	5:05:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	5:05:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	5:05:36 PM	Recipe started at 5:05 PM
11/13/2010	5:05:36 PM	H2 valve closed
11/13/2010	5:05:36 PM	BCl3 valve closed
11/13/2010	5:05:36 PM	PH3 valve closed
11/13/2010	5:05:36 PM	SiCl4 pre valve closed
11/13/2010	5:05:36 PM	SiCl4 post valve closed
11/13/2010	5:05:36 PM	Main Vac valve closed
11/13/2010	5:05:36 PM	Bypass valve closed
11/13/2010	5:05:36 PM	Bubbler valve closed
11/13/2010	5:05:36 PM	Helium valve opened
11/13/2010	5:05:36 PM	Helium MFC set to  500.000000
11/13/2010	5:05:36 PM	H2 MFC set to  0.000000
11/13/2010	5:05:36 PM	BCl3 MFC set to  0.000000
11/13/2010	5:05:36 PM	PHl3 MFC set to  0.000000
11/13/2010	5:05:36 PM	SiCl4 MFC set to  0.000000
11/13/2010	5:05:36 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	5:05:36 PM	Tube furnace set to 0
11/13/2010	5:06:46 PM	Helium valve closed
11/13/2010	5:06:46 PM	H2 valve closed
11/13/2010	5:06:46 PM	BCl3 valve closed
11/13/2010	5:06:46 PM	PH3 valve closed
11/13/2010	5:06:46 PM	SiCl4 pre valve closed
11/13/2010	5:06:46 PM	SiCl4 post valve closed
11/13/2010	5:06:46 PM	Main Vac valve closed
11/13/2010	5:06:46 PM	Bypass valve closed
11/13/2010	5:06:46 PM	Bubbler valve closed
11/13/2010	5:06:46 PM	Helium MFC set to  0.000000
11/13/2010	5:06:46 PM	H2 MFC set to  0.000000
11/13/2010	5:06:46 PM	BCl3 MFC set to  0.000000
11/13/2010	5:06:46 PM	PHl3 MFC set to  0.000000
11/13/2010	5:06:46 PM	SiCl4 MFC set to  0.000000
11/13/2010	5:06:46 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	5:06:46 PM	Tube furnace set to 0
11/13/2010	5:06:46 PM	Run finished at 5:06 PM
11/13/2010	5:06:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	5:08:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	5:08:09 PM	Recipe started at 5:08 PM
11/13/2010	5:08:09 PM	Helium valve closed
11/13/2010	5:08:09 PM	H2 valve closed
11/13/2010	5:08:09 PM	BCl3 valve closed
11/13/2010	5:08:09 PM	PH3 valve closed
11/13/2010	5:08:09 PM	SiCl4 pre valve closed
11/13/2010	5:08:09 PM	SiCl4 post valve closed
11/13/2010	5:08:10 PM	Main Vac valve closed
11/13/2010	5:08:10 PM	Bubbler valve closed
11/13/2010	5:08:10 PM	Bypass valve opened
11/13/2010	5:08:10 PM	Helium MFC set to  0.000000
11/13/2010	5:08:10 PM	H2 MFC set to  0.000000
11/13/2010	5:08:10 PM	BCl3 MFC set to  0.000000
11/13/2010	5:08:10 PM	PHl3 MFC set to  0.000000
11/13/2010	5:08:10 PM	SiCl4 MFC set to  0.000000
11/13/2010	5:08:10 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	5:08:10 PM	Tube furnace set to 0
11/13/2010	5:08:49 PM	Helium valve closed
11/13/2010	5:08:49 PM	H2 valve closed
11/13/2010	5:08:49 PM	BCl3 valve closed
11/13/2010	5:08:49 PM	PH3 valve closed
11/13/2010	5:08:49 PM	SiCl4 pre valve closed
11/13/2010	5:08:49 PM	SiCl4 post valve closed
11/13/2010	5:08:49 PM	Bubbler valve closed
11/13/2010	5:08:49 PM	Main Vac valve opened
11/13/2010	5:08:49 PM	Bypass valve opened
11/13/2010	5:08:49 PM	Helium MFC set to  0.000000
11/13/2010	5:08:49 PM	H2 MFC set to  0.000000
11/13/2010	5:08:49 PM	BCl3 MFC set to  0.000000
11/13/2010	5:08:49 PM	PHl3 MFC set to  0.000000
11/13/2010	5:08:49 PM	SiCl4 MFC set to  0.000000
11/13/2010	5:08:49 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	5:08:49 PM	Tube furnace set to 0
11/13/2010	5:08:50 PM	Run finished at 5:08 PM
11/13/2010	5:08:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	5:10:54 PM	Helium MFC set to  100.000000
11/13/2010	5:10:56 PM	Helium valve opened
11/13/2010	5:17:21 PM	Helium valve closed
11/13/2010	5:17:51 PM	Helium valve opened
11/13/2010	5:22:32 PM	Helium valve closed
11/13/2010	5:23:13 PM	Helium valve opened
11/13/2010	5:27:35 PM	Helium valve closed
11/13/2010	5:28:36 PM	Helium valve opened
11/13/2010	5:28:42 PM	Helium MFC set to  500.000000
11/13/2010	5:29:38 PM	Helium MFC set to  300.000000
11/13/2010	5:29:45 PM	Helium MFC set to  100.000000
11/13/2010	5:39:10 PM	Helium valve closed
11/13/2010	5:40:00 PM	Recipe started at 5:39 PM
11/13/2010	5:40:00 PM	Helium valve closed
11/13/2010	5:40:00 PM	BCl3 valve closed
11/13/2010	5:40:00 PM	PH3 valve closed
11/13/2010	5:40:00 PM	SiCl4 pre valve closed
11/13/2010	5:40:00 PM	SiCl4 post valve closed
11/13/2010	5:40:00 PM	Main Vac valve closed
11/13/2010	5:40:00 PM	Bypass valve closed
11/13/2010	5:40:00 PM	Bubbler valve closed
11/13/2010	5:40:01 PM	H2 valve opened
11/13/2010	5:40:01 PM	Helium MFC set to  0.000000
11/13/2010	5:40:01 PM	H2 MFC set to  500.000000
11/13/2010	5:40:01 PM	BCl3 MFC set to  0.000000
11/13/2010	5:40:01 PM	PHl3 MFC set to  0.000000
11/13/2010	5:40:01 PM	SiCl4 MFC set to  0.000000
11/13/2010	5:40:01 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	5:40:01 PM	Tube furnace set to 1000
11/13/2010	5:41:23 PM	Helium valve closed
11/13/2010	5:41:23 PM	BCl3 valve closed
11/13/2010	5:41:23 PM	PH3 valve closed
11/13/2010	5:41:23 PM	SiCl4 pre valve closed
11/13/2010	5:41:23 PM	SiCl4 post valve closed
11/13/2010	5:41:23 PM	Main Vac valve closed
11/13/2010	5:41:23 PM	Bypass valve closed
11/13/2010	5:41:23 PM	H2 valve opened
11/13/2010	5:41:23 PM	Bubbler valve opened
11/13/2010	5:41:23 PM	Helium MFC set to  0.000000
11/13/2010	5:41:23 PM	H2 MFC set to  500.000000
11/13/2010	5:41:23 PM	BCl3 MFC set to  0.000000
11/13/2010	5:41:23 PM	PHl3 MFC set to  0.000000
11/13/2010	5:41:23 PM	SiCl4 MFC set to  0.000000
11/13/2010	5:41:23 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	5:41:23 PM	Tube furnace set to 1000
11/13/2010	5:56:27 PM	Run aborted at 5:56 PM
11/13/2010	5:56:27 PM	Helium valve closed
11/13/2010	5:56:27 PM	H2 valve closed
11/13/2010	5:56:27 PM	BCl3 valve closed
11/13/2010	5:56:27 PM	PH3 valve closed
11/13/2010	5:56:27 PM	SiCl4 pre valve closed
11/13/2010	5:56:27 PM	SiCl4 post valve closed
11/13/2010	5:56:27 PM	Bypass valve closed
11/13/2010	5:56:27 PM	Main Vac valve closed
11/13/2010	5:56:27 PM	Bubbler valve closed
11/13/2010	5:56:27 PM	Helium MFC set to  0.000000
11/13/2010	5:56:27 PM	H2 MFC set to  0.000000
11/13/2010	5:56:27 PM	BCl3 MFC set to  0.000000
11/13/2010	5:56:27 PM	PHl3 MFC set to  0.000000
11/13/2010	5:56:27 PM	SiCl4 MFC set to  0.000000
11/13/2010	5:56:27 PM	Tube furnace set to 0
11/13/2010	5:56:31 PM	Recipe started at 5:56 PM
11/13/2010	5:56:31 PM	Helium valve closed
11/13/2010	5:56:31 PM	BCl3 valve closed
11/13/2010	5:56:31 PM	PH3 valve closed
11/13/2010	5:56:31 PM	SiCl4 pre valve closed
11/13/2010	5:56:31 PM	SiCl4 post valve closed
11/13/2010	5:56:31 PM	Main Vac valve closed
11/13/2010	5:56:31 PM	Bypass valve closed
11/13/2010	5:56:31 PM	Bubbler valve closed
11/13/2010	5:56:31 PM	H2 valve opened
11/13/2010	5:56:31 PM	Helium MFC set to  0.000000
11/13/2010	5:56:31 PM	H2 MFC set to  500.000000
11/13/2010	5:56:31 PM	BCl3 MFC set to  0.000000
11/13/2010	5:56:31 PM	PHl3 MFC set to  0.000000
11/13/2010	5:56:31 PM	SiCl4 MFC set to  0.000000
11/13/2010	5:56:31 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	5:56:31 PM	Tube furnace set to 1000
11/13/2010	5:56:32 PM	Helium valve closed
11/13/2010	5:56:32 PM	BCl3 valve closed
11/13/2010	5:56:32 PM	PH3 valve closed
11/13/2010	5:56:32 PM	SiCl4 pre valve closed
11/13/2010	5:56:32 PM	SiCl4 post valve closed
11/13/2010	5:56:32 PM	Main Vac valve closed
11/13/2010	5:56:32 PM	Bypass valve closed
11/13/2010	5:56:32 PM	H2 valve opened
11/13/2010	5:56:32 PM	Bubbler valve opened
11/13/2010	5:56:32 PM	Helium MFC set to  0.000000
11/13/2010	5:56:32 PM	H2 MFC set to  500.000000
11/13/2010	5:56:32 PM	BCl3 MFC set to  0.000000
11/13/2010	5:56:32 PM	PHl3 MFC set to  0.000000
11/13/2010	5:56:32 PM	SiCl4 MFC set to  0.000000
11/13/2010	5:56:32 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	5:56:33 PM	Tube furnace set to 1000
11/13/2010	6:16:33 PM	Helium valve closed
11/13/2010	6:16:33 PM	PH3 valve closed
11/13/2010	6:16:33 PM	Main Vac valve closed
11/13/2010	6:16:33 PM	Bypass valve closed
11/13/2010	6:16:33 PM	H2 valve opened
11/13/2010	6:16:33 PM	BCl3 valve opened
11/13/2010	6:16:33 PM	SiCl4 pre valve opened
11/13/2010	6:16:33 PM	SiCl4 post valve opened
11/13/2010	6:16:33 PM	Bubbler valve opened
11/13/2010	6:16:33 PM	Helium MFC set to  0.000000
11/13/2010	6:16:33 PM	H2 MFC set to  500.000000
11/13/2010	6:16:33 PM	BCl3 MFC set to  12.000000
11/13/2010	6:16:33 PM	PHl3 MFC set to  0.000000
11/13/2010	6:16:33 PM	SiCl4 MFC set to  50.000000
11/13/2010	6:16:33 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	6:16:33 PM	Tube furnace set to 1000
11/13/2010	6:29:53 PM	Helium valve closed
11/13/2010	6:29:53 PM	BCl3 valve closed
11/13/2010	6:29:53 PM	PH3 valve closed
11/13/2010	6:29:53 PM	SiCl4 pre valve closed
11/13/2010	6:29:53 PM	SiCl4 post valve closed
11/13/2010	6:29:53 PM	Main Vac valve closed
11/13/2010	6:29:53 PM	Bypass valve closed
11/13/2010	6:29:53 PM	H2 valve opened
11/13/2010	6:29:53 PM	Bubbler valve opened
11/13/2010	6:29:53 PM	Helium MFC set to  0.000000
11/13/2010	6:29:53 PM	H2 MFC set to  500.000000
11/13/2010	6:29:53 PM	BCl3 MFC set to  0.000000
11/13/2010	6:29:53 PM	PHl3 MFC set to  0.000000
11/13/2010	6:29:53 PM	SiCl4 MFC set to  0.000000
11/13/2010	6:29:53 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	6:29:53 PM	Tube furnace set to 750
11/13/2010	6:49:53 PM	H2 valve closed
11/13/2010	6:49:53 PM	BCl3 valve closed
11/13/2010	6:49:53 PM	PH3 valve closed
11/13/2010	6:49:53 PM	SiCl4 pre valve closed
11/13/2010	6:49:53 PM	SiCl4 post valve closed
11/13/2010	6:49:53 PM	Main Vac valve closed
11/13/2010	6:49:53 PM	Bypass valve closed
11/13/2010	6:49:53 PM	Helium valve opened
11/13/2010	6:49:53 PM	Bubbler valve opened
11/13/2010	6:49:53 PM	Helium MFC set to  500.000000
11/13/2010	6:49:53 PM	H2 MFC set to  0.000000
11/13/2010	6:49:53 PM	BCl3 MFC set to  0.000000
11/13/2010	6:49:53 PM	PHl3 MFC set to  0.000000
11/13/2010	6:49:53 PM	SiCl4 MFC set to  0.000000
11/13/2010	6:49:53 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	6:49:53 PM	Tube furnace set to 0
11/13/2010	6:52:33 PM	Helium valve closed
11/13/2010	6:52:34 PM	H2 valve closed
11/13/2010	6:52:34 PM	BCl3 valve closed
11/13/2010	6:52:34 PM	PH3 valve closed
11/13/2010	6:52:34 PM	SiCl4 pre valve closed
11/13/2010	6:52:34 PM	SiCl4 post valve closed
11/13/2010	6:52:34 PM	Main Vac valve closed
11/13/2010	6:52:34 PM	Bypass valve closed
11/13/2010	6:52:34 PM	Bubbler valve closed
11/13/2010	6:52:34 PM	Helium MFC set to  0.000000
11/13/2010	6:52:34 PM	H2 MFC set to  0.000000
11/13/2010	6:52:34 PM	BCl3 MFC set to  0.000000
11/13/2010	6:52:34 PM	PHl3 MFC set to  0.000000
11/13/2010	6:52:34 PM	SiCl4 MFC set to  0.000000
11/13/2010	6:52:34 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	6:52:34 PM	Tube furnace set to 0
11/13/2010	6:52:34 PM	Run finished at 6:52 PM
11/13/2010	6:52:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	6:52:37 PM	Recipe started at 6:52 PM
11/13/2010	6:52:37 PM	H2 valve closed
11/13/2010	6:52:37 PM	BCl3 valve closed
11/13/2010	6:52:37 PM	PH3 valve closed
11/13/2010	6:52:37 PM	SiCl4 pre valve closed
11/13/2010	6:52:37 PM	SiCl4 post valve closed
11/13/2010	6:52:37 PM	Main Vac valve closed
11/13/2010	6:52:37 PM	Bypass valve closed
11/13/2010	6:52:37 PM	Bubbler valve closed
11/13/2010	6:52:37 PM	Helium valve opened
11/13/2010	6:52:37 PM	Helium MFC set to  500.000000
11/13/2010	6:52:37 PM	H2 MFC set to  0.000000
11/13/2010	6:52:37 PM	BCl3 MFC set to  0.000000
11/13/2010	6:52:37 PM	PHl3 MFC set to  0.000000
11/13/2010	6:52:37 PM	SiCl4 MFC set to  0.000000
11/13/2010	6:52:37 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	6:52:38 PM	Tube furnace set to 0
11/13/2010	6:52:38 PM	Helium valve closed
11/13/2010	6:52:38 PM	H2 valve closed
11/13/2010	6:52:38 PM	BCl3 valve closed
11/13/2010	6:52:38 PM	PH3 valve closed
11/13/2010	6:52:38 PM	SiCl4 pre valve closed
11/13/2010	6:52:38 PM	SiCl4 post valve closed
11/13/2010	6:52:38 PM	Main Vac valve closed
11/13/2010	6:52:38 PM	Bypass valve closed
11/13/2010	6:52:38 PM	Bubbler valve closed
11/13/2010	6:52:38 PM	Helium MFC set to  0.000000
11/13/2010	6:52:38 PM	H2 MFC set to  0.000000
11/13/2010	6:52:38 PM	BCl3 MFC set to  0.000000
11/13/2010	6:52:38 PM	PHl3 MFC set to  0.000000
11/13/2010	6:52:38 PM	SiCl4 MFC set to  0.000000
11/13/2010	6:52:38 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	6:52:38 PM	Tube furnace set to 0
11/13/2010	6:52:38 PM	Run finished at 6:52 PM
11/13/2010	6:52:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	6:59:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	6:59:34 PM	Recipe started at 6:59 PM
11/13/2010	6:59:34 PM	Helium valve closed
11/13/2010	6:59:34 PM	H2 valve closed
11/13/2010	6:59:34 PM	BCl3 valve closed
11/13/2010	6:59:34 PM	PH3 valve closed
11/13/2010	6:59:34 PM	SiCl4 pre valve closed
11/13/2010	6:59:34 PM	SiCl4 post valve closed
11/13/2010	6:59:34 PM	Main Vac valve closed
11/13/2010	6:59:34 PM	Bubbler valve closed
11/13/2010	6:59:34 PM	Bypass valve opened
11/13/2010	6:59:34 PM	Helium MFC set to  0.000000
11/13/2010	6:59:34 PM	H2 MFC set to  0.000000
11/13/2010	6:59:34 PM	BCl3 MFC set to  0.000000
11/13/2010	6:59:34 PM	PHl3 MFC set to  0.000000
11/13/2010	6:59:34 PM	SiCl4 MFC set to  0.000000
11/13/2010	6:59:34 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	6:59:34 PM	Tube furnace set to 0
11/13/2010	7:00:26 PM	Helium valve closed
11/13/2010	7:00:26 PM	H2 valve closed
11/13/2010	7:00:26 PM	BCl3 valve closed
11/13/2010	7:00:26 PM	PH3 valve closed
11/13/2010	7:00:26 PM	SiCl4 pre valve closed
11/13/2010	7:00:26 PM	SiCl4 post valve closed
11/13/2010	7:00:26 PM	Bubbler valve closed
11/13/2010	7:00:26 PM	Main Vac valve opened
11/13/2010	7:00:26 PM	Bypass valve opened
11/13/2010	7:00:26 PM	Helium MFC set to  0.000000
11/13/2010	7:00:26 PM	H2 MFC set to  0.000000
11/13/2010	7:00:26 PM	BCl3 MFC set to  0.000000
11/13/2010	7:00:26 PM	PHl3 MFC set to  0.000000
11/13/2010	7:00:26 PM	SiCl4 MFC set to  0.000000
11/13/2010	7:00:26 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	7:00:27 PM	Tube furnace set to 0
11/13/2010	7:00:27 PM	Run finished at 7:00 PM
11/13/2010	7:00:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	7:00:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	7:00:37 PM	Recipe started at 7:00 PM
11/13/2010	7:00:37 PM	H2 valve closed
11/13/2010	7:00:37 PM	BCl3 valve closed
11/13/2010	7:00:37 PM	PH3 valve closed
11/13/2010	7:00:37 PM	SiCl4 pre valve closed
11/13/2010	7:00:37 PM	SiCl4 post valve closed
11/13/2010	7:00:37 PM	Main Vac valve closed
11/13/2010	7:00:37 PM	Bypass valve closed
11/13/2010	7:00:37 PM	Bubbler valve closed
11/13/2010	7:00:37 PM	Helium valve opened
11/13/2010	7:00:37 PM	Helium MFC set to  500.000000
11/13/2010	7:00:37 PM	H2 MFC set to  0.000000
11/13/2010	7:00:37 PM	BCl3 MFC set to  0.000000
11/13/2010	7:00:37 PM	PHl3 MFC set to  0.000000
11/13/2010	7:00:37 PM	SiCl4 MFC set to  0.000000
11/13/2010	7:00:37 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	7:00:37 PM	Tube furnace set to 0
11/13/2010	7:01:54 PM	Helium valve closed
11/13/2010	7:01:54 PM	H2 valve closed
11/13/2010	7:01:54 PM	BCl3 valve closed
11/13/2010	7:01:54 PM	PH3 valve closed
11/13/2010	7:01:54 PM	SiCl4 pre valve closed
11/13/2010	7:01:54 PM	SiCl4 post valve closed
11/13/2010	7:01:54 PM	Main Vac valve closed
11/13/2010	7:01:54 PM	Bypass valve closed
11/13/2010	7:01:54 PM	Bubbler valve closed
11/13/2010	7:01:54 PM	Helium MFC set to  0.000000
11/13/2010	7:01:54 PM	H2 MFC set to  0.000000
11/13/2010	7:01:54 PM	BCl3 MFC set to  0.000000
11/13/2010	7:01:54 PM	PHl3 MFC set to  0.000000
11/13/2010	7:01:54 PM	SiCl4 MFC set to  0.000000
11/13/2010	7:01:54 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	7:01:54 PM	Tube furnace set to 0
11/13/2010	7:01:54 PM	Run finished at 7:01 PM
11/13/2010	7:01:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	7:02:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	7:02:24 PM	Recipe started at 7:02 PM
11/13/2010	7:02:24 PM	Helium valve closed
11/13/2010	7:02:24 PM	H2 valve closed
11/13/2010	7:02:24 PM	BCl3 valve closed
11/13/2010	7:02:24 PM	PH3 valve closed
11/13/2010	7:02:24 PM	SiCl4 pre valve closed
11/13/2010	7:02:24 PM	SiCl4 post valve closed
11/13/2010	7:02:24 PM	Main Vac valve closed
11/13/2010	7:02:24 PM	Bubbler valve closed
11/13/2010	7:02:24 PM	Bypass valve opened
11/13/2010	7:02:24 PM	Helium MFC set to  0.000000
11/13/2010	7:02:24 PM	H2 MFC set to  0.000000
11/13/2010	7:02:24 PM	BCl3 MFC set to  0.000000
11/13/2010	7:02:24 PM	PHl3 MFC set to  0.000000
11/13/2010	7:02:24 PM	SiCl4 MFC set to  0.000000
11/13/2010	7:02:24 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	7:02:24 PM	Tube furnace set to 0
11/13/2010	7:02:59 PM	Helium valve closed
11/13/2010	7:02:59 PM	H2 valve closed
11/13/2010	7:02:59 PM	BCl3 valve closed
11/13/2010	7:02:59 PM	PH3 valve closed
11/13/2010	7:02:59 PM	SiCl4 pre valve closed
11/13/2010	7:02:59 PM	SiCl4 post valve closed
11/13/2010	7:02:59 PM	Bubbler valve closed
11/13/2010	7:02:59 PM	Main Vac valve opened
11/13/2010	7:02:59 PM	Bypass valve opened
11/13/2010	7:02:59 PM	Helium MFC set to  0.000000
11/13/2010	7:02:59 PM	H2 MFC set to  0.000000
11/13/2010	7:02:59 PM	BCl3 MFC set to  0.000000
11/13/2010	7:02:59 PM	PHl3 MFC set to  0.000000
11/13/2010	7:02:59 PM	SiCl4 MFC set to  0.000000
11/13/2010	7:02:59 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	7:02:59 PM	Tube furnace set to 0
11/13/2010	7:03:00 PM	Run finished at 7:03 PM
11/13/2010	7:03:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	7:03:25 PM	Helium MFC set to  100.000000
11/13/2010	7:03:26 PM	Helium valve opened
11/13/2010	7:29:26 PM	Helium valve closed
11/13/2010	7:30:12 PM	Helium valve opened
11/13/2010	7:31:51 PM	Helium valve closed
11/13/2010	7:32:42 PM	Recipe started at 7:32 PM
11/13/2010	7:32:42 PM	Helium valve closed
11/13/2010	7:32:42 PM	BCl3 valve closed
11/13/2010	7:32:43 PM	PH3 valve closed
11/13/2010	7:32:43 PM	SiCl4 pre valve closed
11/13/2010	7:32:43 PM	SiCl4 post valve closed
11/13/2010	7:32:43 PM	Main Vac valve closed
11/13/2010	7:32:43 PM	Bypass valve closed
11/13/2010	7:32:43 PM	Bubbler valve closed
11/13/2010	7:32:43 PM	H2 valve opened
11/13/2010	7:32:43 PM	Helium MFC set to  0.000000
11/13/2010	7:32:43 PM	H2 MFC set to  500.000000
11/13/2010	7:32:43 PM	BCl3 MFC set to  0.000000
11/13/2010	7:32:43 PM	PHl3 MFC set to  0.000000
11/13/2010	7:32:43 PM	SiCl4 MFC set to  0.000000
11/13/2010	7:32:43 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	7:32:43 PM	Tube furnace set to 1000
11/13/2010	7:34:03 PM	Helium valve closed
11/13/2010	7:34:03 PM	BCl3 valve closed
11/13/2010	7:34:03 PM	PH3 valve closed
11/13/2010	7:34:03 PM	SiCl4 pre valve closed
11/13/2010	7:34:03 PM	SiCl4 post valve closed
11/13/2010	7:34:03 PM	Main Vac valve closed
11/13/2010	7:34:03 PM	Bypass valve closed
11/13/2010	7:34:03 PM	H2 valve opened
11/13/2010	7:34:03 PM	Bubbler valve opened
11/13/2010	7:34:03 PM	Helium MFC set to  0.000000
11/13/2010	7:34:03 PM	H2 MFC set to  500.000000
11/13/2010	7:34:03 PM	BCl3 MFC set to  0.000000
11/13/2010	7:34:03 PM	PHl3 MFC set to  0.000000
11/13/2010	7:34:03 PM	SiCl4 MFC set to  0.000000
11/13/2010	7:34:03 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	7:34:03 PM	Tube furnace set to 1000
11/13/2010	7:54:03 PM	Helium valve closed
11/13/2010	7:54:03 PM	PH3 valve closed
11/13/2010	7:54:03 PM	Main Vac valve closed
11/13/2010	7:54:03 PM	Bypass valve closed
11/13/2010	7:54:03 PM	H2 valve opened
11/13/2010	7:54:03 PM	BCl3 valve opened
11/13/2010	7:54:03 PM	SiCl4 pre valve opened
11/13/2010	7:54:03 PM	SiCl4 post valve opened
11/13/2010	7:54:03 PM	Bubbler valve opened
11/13/2010	7:54:03 PM	Helium MFC set to  0.000000
11/13/2010	7:54:03 PM	H2 MFC set to  500.000000
11/13/2010	7:54:03 PM	BCl3 MFC set to  12.000000
11/13/2010	7:54:03 PM	PHl3 MFC set to  0.000000
11/13/2010	7:54:03 PM	SiCl4 MFC set to  50.000000
11/13/2010	7:54:03 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	7:54:03 PM	Tube furnace set to 1000
11/13/2010	8:09:03 PM	Helium valve closed
11/13/2010	8:09:03 PM	BCl3 valve closed
11/13/2010	8:09:03 PM	PH3 valve closed
11/13/2010	8:09:03 PM	SiCl4 pre valve closed
11/13/2010	8:09:03 PM	SiCl4 post valve closed
11/13/2010	8:09:03 PM	Main Vac valve closed
11/13/2010	8:09:03 PM	Bypass valve closed
11/13/2010	8:09:03 PM	H2 valve opened
11/13/2010	8:09:03 PM	Bubbler valve opened
11/13/2010	8:09:03 PM	Helium MFC set to  0.000000
11/13/2010	8:09:03 PM	H2 MFC set to  500.000000
11/13/2010	8:09:03 PM	BCl3 MFC set to  0.000000
11/13/2010	8:09:03 PM	PHl3 MFC set to  0.000000
11/13/2010	8:09:03 PM	SiCl4 MFC set to  0.000000
11/13/2010	8:09:03 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	8:09:03 PM	Tube furnace set to 750
11/13/2010	8:29:03 PM	H2 valve closed
11/13/2010	8:29:03 PM	BCl3 valve closed
11/13/2010	8:29:03 PM	PH3 valve closed
11/13/2010	8:29:03 PM	SiCl4 pre valve closed
11/13/2010	8:29:03 PM	SiCl4 post valve closed
11/13/2010	8:29:03 PM	Main Vac valve closed
11/13/2010	8:29:03 PM	Bypass valve closed
11/13/2010	8:29:03 PM	Helium valve opened
11/13/2010	8:29:03 PM	Bubbler valve opened
11/13/2010	8:29:03 PM	Helium MFC set to  500.000000
11/13/2010	8:29:03 PM	H2 MFC set to  0.000000
11/13/2010	8:29:03 PM	BCl3 MFC set to  0.000000
11/13/2010	8:29:03 PM	PHl3 MFC set to  0.000000
11/13/2010	8:29:03 PM	SiCl4 MFC set to  0.000000
11/13/2010	8:29:03 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	8:29:03 PM	Tube furnace set to 0
11/13/2010	8:32:50 PM	Helium valve closed
11/13/2010	8:32:50 PM	H2 valve closed
11/13/2010	8:32:50 PM	BCl3 valve closed
11/13/2010	8:32:50 PM	PH3 valve closed
11/13/2010	8:32:50 PM	SiCl4 pre valve closed
11/13/2010	8:32:50 PM	SiCl4 post valve closed
11/13/2010	8:32:50 PM	Main Vac valve closed
11/13/2010	8:32:50 PM	Bypass valve closed
11/13/2010	8:32:50 PM	Bubbler valve closed
11/13/2010	8:32:50 PM	Helium MFC set to  0.000000
11/13/2010	8:32:50 PM	H2 MFC set to  0.000000
11/13/2010	8:32:50 PM	BCl3 MFC set to  0.000000
11/13/2010	8:32:50 PM	PHl3 MFC set to  0.000000
11/13/2010	8:32:50 PM	SiCl4 MFC set to  0.000000
11/13/2010	8:32:50 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	8:32:50 PM	Tube furnace set to 0
11/13/2010	8:32:50 PM	Run finished at 8:32 PM
11/13/2010	8:32:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	8:32:53 PM	Recipe started at 8:32 PM
11/13/2010	8:32:54 PM	H2 valve closed
11/13/2010	8:32:54 PM	BCl3 valve closed
11/13/2010	8:32:54 PM	PH3 valve closed
11/13/2010	8:32:54 PM	SiCl4 pre valve closed
11/13/2010	8:32:54 PM	SiCl4 post valve closed
11/13/2010	8:32:54 PM	Main Vac valve closed
11/13/2010	8:32:54 PM	Bypass valve closed
11/13/2010	8:32:54 PM	Bubbler valve closed
11/13/2010	8:32:54 PM	Helium valve opened
11/13/2010	8:32:54 PM	Helium MFC set to  500.000000
11/13/2010	8:32:54 PM	H2 MFC set to  0.000000
11/13/2010	8:32:54 PM	BCl3 MFC set to  0.000000
11/13/2010	8:32:54 PM	PHl3 MFC set to  0.000000
11/13/2010	8:32:54 PM	SiCl4 MFC set to  0.000000
11/13/2010	8:32:54 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	8:32:54 PM	Tube furnace set to 0
11/13/2010	8:32:54 PM	Helium valve closed
11/13/2010	8:32:54 PM	H2 valve closed
11/13/2010	8:32:54 PM	BCl3 valve closed
11/13/2010	8:32:54 PM	PH3 valve closed
11/13/2010	8:32:54 PM	SiCl4 pre valve closed
11/13/2010	8:32:54 PM	SiCl4 post valve closed
11/13/2010	8:32:54 PM	Main Vac valve closed
11/13/2010	8:32:54 PM	Bypass valve closed
11/13/2010	8:32:54 PM	Bubbler valve closed
11/13/2010	8:32:54 PM	Helium MFC set to  0.000000
11/13/2010	8:32:54 PM	H2 MFC set to  0.000000
11/13/2010	8:32:54 PM	BCl3 MFC set to  0.000000
11/13/2010	8:32:54 PM	PHl3 MFC set to  0.000000
11/13/2010	8:32:54 PM	SiCl4 MFC set to  0.000000
11/13/2010	8:32:54 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	8:32:54 PM	Tube furnace set to 0
11/13/2010	8:32:54 PM	Run finished at 8:32 PM
11/13/2010	8:32:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	8:36:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	8:36:04 PM	Recipe started at 8:36 PM
11/13/2010	8:36:04 PM	Helium valve closed
11/13/2010	8:36:04 PM	H2 valve closed
11/13/2010	8:36:04 PM	BCl3 valve closed
11/13/2010	8:36:04 PM	PH3 valve closed
11/13/2010	8:36:04 PM	SiCl4 pre valve closed
11/13/2010	8:36:04 PM	SiCl4 post valve closed
11/13/2010	8:36:04 PM	Main Vac valve closed
11/13/2010	8:36:04 PM	Bubbler valve closed
11/13/2010	8:36:04 PM	Bypass valve opened
11/13/2010	8:36:04 PM	Helium MFC set to  0.000000
11/13/2010	8:36:04 PM	H2 MFC set to  0.000000
11/13/2010	8:36:04 PM	BCl3 MFC set to  0.000000
11/13/2010	8:36:04 PM	PHl3 MFC set to  0.000000
11/13/2010	8:36:04 PM	SiCl4 MFC set to  0.000000
11/13/2010	8:36:04 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	8:36:04 PM	Tube furnace set to 0
11/13/2010	8:36:53 PM	Helium valve closed
11/13/2010	8:36:53 PM	H2 valve closed
11/13/2010	8:36:53 PM	BCl3 valve closed
11/13/2010	8:36:53 PM	PH3 valve closed
11/13/2010	8:36:53 PM	SiCl4 pre valve closed
11/13/2010	8:36:53 PM	SiCl4 post valve closed
11/13/2010	8:36:53 PM	Bubbler valve closed
11/13/2010	8:36:53 PM	Main Vac valve opened
11/13/2010	8:36:53 PM	Bypass valve opened
11/13/2010	8:36:53 PM	Helium MFC set to  0.000000
11/13/2010	8:36:53 PM	H2 MFC set to  0.000000
11/13/2010	8:36:53 PM	BCl3 MFC set to  0.000000
11/13/2010	8:36:53 PM	PHl3 MFC set to  0.000000
11/13/2010	8:36:53 PM	SiCl4 MFC set to  0.000000
11/13/2010	8:36:53 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	8:36:53 PM	Tube furnace set to 0
11/13/2010	8:36:54 PM	Run finished at 8:36 PM
11/13/2010	8:36:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	8:38:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	8:38:30 PM	Recipe started at 8:38 PM
11/13/2010	8:38:30 PM	H2 valve closed
11/13/2010	8:38:30 PM	BCl3 valve closed
11/13/2010	8:38:30 PM	PH3 valve closed
11/13/2010	8:38:30 PM	SiCl4 pre valve closed
11/13/2010	8:38:30 PM	SiCl4 post valve closed
11/13/2010	8:38:30 PM	Main Vac valve closed
11/13/2010	8:38:30 PM	Bypass valve closed
11/13/2010	8:38:30 PM	Bubbler valve closed
11/13/2010	8:38:30 PM	Helium valve opened
11/13/2010	8:38:30 PM	Helium MFC set to  500.000000
11/13/2010	8:38:30 PM	H2 MFC set to  0.000000
11/13/2010	8:38:30 PM	BCl3 MFC set to  0.000000
11/13/2010	8:38:30 PM	PHl3 MFC set to  0.000000
11/13/2010	8:38:30 PM	SiCl4 MFC set to  0.000000
11/13/2010	8:38:30 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	8:38:31 PM	Tube furnace set to 0
11/13/2010	8:39:47 PM	Helium valve closed
11/13/2010	8:39:47 PM	H2 valve closed
11/13/2010	8:39:47 PM	BCl3 valve closed
11/13/2010	8:39:47 PM	PH3 valve closed
11/13/2010	8:39:47 PM	SiCl4 pre valve closed
11/13/2010	8:39:47 PM	SiCl4 post valve closed
11/13/2010	8:39:47 PM	Main Vac valve closed
11/13/2010	8:39:47 PM	Bypass valve closed
11/13/2010	8:39:47 PM	Bubbler valve closed
11/13/2010	8:39:47 PM	Helium MFC set to  0.000000
11/13/2010	8:39:47 PM	H2 MFC set to  0.000000
11/13/2010	8:39:47 PM	BCl3 MFC set to  0.000000
11/13/2010	8:39:47 PM	PHl3 MFC set to  0.000000
11/13/2010	8:39:47 PM	SiCl4 MFC set to  0.000000
11/13/2010	8:39:47 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	8:39:47 PM	Tube furnace set to 0
11/13/2010	8:39:47 PM	Run finished at 8:39 PM
11/13/2010	8:39:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	8:39:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	8:39:54 PM	Recipe started at 8:39 PM
11/13/2010	8:39:55 PM	Helium valve closed
11/13/2010	8:39:55 PM	H2 valve closed
11/13/2010	8:39:55 PM	BCl3 valve closed
11/13/2010	8:39:55 PM	PH3 valve closed
11/13/2010	8:39:55 PM	SiCl4 pre valve closed
11/13/2010	8:39:55 PM	SiCl4 post valve closed
11/13/2010	8:39:55 PM	Main Vac valve closed
11/13/2010	8:39:55 PM	Bubbler valve closed
11/13/2010	8:39:55 PM	Bypass valve opened
11/13/2010	8:39:55 PM	Helium MFC set to  0.000000
11/13/2010	8:39:55 PM	H2 MFC set to  0.000000
11/13/2010	8:39:55 PM	BCl3 MFC set to  0.000000
11/13/2010	8:39:55 PM	PHl3 MFC set to  0.000000
11/13/2010	8:39:55 PM	SiCl4 MFC set to  0.000000
11/13/2010	8:39:55 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	8:39:55 PM	Tube furnace set to 0
11/13/2010	8:40:30 PM	Helium valve closed
11/13/2010	8:40:30 PM	H2 valve closed
11/13/2010	8:40:30 PM	BCl3 valve closed
11/13/2010	8:40:30 PM	PH3 valve closed
11/13/2010	8:40:30 PM	SiCl4 pre valve closed
11/13/2010	8:40:30 PM	SiCl4 post valve closed
11/13/2010	8:40:30 PM	Bubbler valve closed
11/13/2010	8:40:30 PM	Main Vac valve opened
11/13/2010	8:40:30 PM	Bypass valve opened
11/13/2010	8:40:30 PM	Helium MFC set to  0.000000
11/13/2010	8:40:30 PM	H2 MFC set to  0.000000
11/13/2010	8:40:30 PM	BCl3 MFC set to  0.000000
11/13/2010	8:40:30 PM	PHl3 MFC set to  0.000000
11/13/2010	8:40:30 PM	SiCl4 MFC set to  0.000000
11/13/2010	8:40:30 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	8:40:30 PM	Tube furnace set to 0
11/13/2010	8:40:30 PM	Run finished at 8:40 PM
11/13/2010	8:40:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	8:40:36 PM	Helium MFC set to  100.000000
11/13/2010	8:40:38 PM	Helium valve opened
11/13/2010	8:49:51 PM	Helium valve closed
11/13/2010	8:50:26 PM	Helium valve opened
11/13/2010	9:02:30 PM	Helium valve closed
11/13/2010	9:03:24 PM	Recipe started at 9:03 PM
11/13/2010	9:03:24 PM	Helium valve closed
11/13/2010	9:03:24 PM	BCl3 valve closed
11/13/2010	9:03:24 PM	PH3 valve closed
11/13/2010	9:03:24 PM	SiCl4 pre valve closed
11/13/2010	9:03:24 PM	SiCl4 post valve closed
11/13/2010	9:03:24 PM	Main Vac valve closed
11/13/2010	9:03:24 PM	Bypass valve closed
11/13/2010	9:03:24 PM	Bubbler valve closed
11/13/2010	9:03:24 PM	H2 valve opened
11/13/2010	9:03:24 PM	Helium MFC set to  0.000000
11/13/2010	9:03:24 PM	H2 MFC set to  500.000000
11/13/2010	9:03:24 PM	BCl3 MFC set to  0.000000
11/13/2010	9:03:24 PM	PHl3 MFC set to  0.000000
11/13/2010	9:03:24 PM	SiCl4 MFC set to  0.000000
11/13/2010	9:03:24 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	9:03:24 PM	Tube furnace set to 1000
11/13/2010	9:04:46 PM	Helium valve closed
11/13/2010	9:04:46 PM	BCl3 valve closed
11/13/2010	9:04:46 PM	PH3 valve closed
11/13/2010	9:04:46 PM	SiCl4 pre valve closed
11/13/2010	9:04:46 PM	SiCl4 post valve closed
11/13/2010	9:04:46 PM	Main Vac valve closed
11/13/2010	9:04:46 PM	Bypass valve closed
11/13/2010	9:04:46 PM	H2 valve opened
11/13/2010	9:04:46 PM	Bubbler valve opened
11/13/2010	9:04:46 PM	Helium MFC set to  0.000000
11/13/2010	9:04:46 PM	H2 MFC set to  500.000000
11/13/2010	9:04:46 PM	BCl3 MFC set to  0.000000
11/13/2010	9:04:46 PM	PHl3 MFC set to  0.000000
11/13/2010	9:04:46 PM	SiCl4 MFC set to  0.000000
11/13/2010	9:04:46 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	9:04:46 PM	Tube furnace set to 1000
11/13/2010	9:24:46 PM	Helium valve closed
11/13/2010	9:24:46 PM	PH3 valve closed
11/13/2010	9:24:46 PM	Main Vac valve closed
11/13/2010	9:24:46 PM	Bypass valve closed
11/13/2010	9:24:46 PM	H2 valve opened
11/13/2010	9:24:46 PM	BCl3 valve opened
11/13/2010	9:24:46 PM	SiCl4 pre valve opened
11/13/2010	9:24:46 PM	SiCl4 post valve opened
11/13/2010	9:24:46 PM	Bubbler valve opened
11/13/2010	9:24:46 PM	Helium MFC set to  0.000000
11/13/2010	9:24:46 PM	H2 MFC set to  500.000000
11/13/2010	9:24:46 PM	BCl3 MFC set to  12.000000
11/13/2010	9:24:46 PM	PHl3 MFC set to  0.000000
11/13/2010	9:24:46 PM	SiCl4 MFC set to  50.000000
11/13/2010	9:24:46 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	9:24:46 PM	Tube furnace set to 1000
11/13/2010	9:39:46 PM	Helium valve closed
11/13/2010	9:39:46 PM	BCl3 valve closed
11/13/2010	9:39:46 PM	PH3 valve closed
11/13/2010	9:39:46 PM	SiCl4 pre valve closed
11/13/2010	9:39:46 PM	SiCl4 post valve closed
11/13/2010	9:39:46 PM	Main Vac valve closed
11/13/2010	9:39:46 PM	Bypass valve closed
11/13/2010	9:39:46 PM	H2 valve opened
11/13/2010	9:39:46 PM	Bubbler valve opened
11/13/2010	9:39:46 PM	Helium MFC set to  0.000000
11/13/2010	9:39:46 PM	H2 MFC set to  500.000000
11/13/2010	9:39:46 PM	BCl3 MFC set to  0.000000
11/13/2010	9:39:46 PM	PHl3 MFC set to  0.000000
11/13/2010	9:39:46 PM	SiCl4 MFC set to  0.000000
11/13/2010	9:39:46 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	9:39:46 PM	Tube furnace set to 750
11/13/2010	9:59:46 PM	H2 valve closed
11/13/2010	9:59:46 PM	BCl3 valve closed
11/13/2010	9:59:46 PM	PH3 valve closed
11/13/2010	9:59:46 PM	SiCl4 pre valve closed
11/13/2010	9:59:46 PM	SiCl4 post valve closed
11/13/2010	9:59:46 PM	Main Vac valve closed
11/13/2010	9:59:46 PM	Bypass valve closed
11/13/2010	9:59:46 PM	Helium valve opened
11/13/2010	9:59:46 PM	Bubbler valve opened
11/13/2010	9:59:46 PM	Helium MFC set to  500.000000
11/13/2010	9:59:46 PM	H2 MFC set to  0.000000
11/13/2010	9:59:46 PM	BCl3 MFC set to  0.000000
11/13/2010	9:59:46 PM	PHl3 MFC set to  0.000000
11/13/2010	9:59:46 PM	SiCl4 MFC set to  0.000000
11/13/2010	9:59:46 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	9:59:46 PM	Tube furnace set to 0
11/13/2010	10:05:41 PM	Helium valve closed
11/13/2010	10:05:41 PM	H2 valve closed
11/13/2010	10:05:41 PM	BCl3 valve closed
11/13/2010	10:05:41 PM	PH3 valve closed
11/13/2010	10:05:41 PM	SiCl4 pre valve closed
11/13/2010	10:05:41 PM	SiCl4 post valve closed
11/13/2010	10:05:41 PM	Main Vac valve closed
11/13/2010	10:05:41 PM	Bypass valve closed
11/13/2010	10:05:41 PM	Bubbler valve closed
11/13/2010	10:05:41 PM	Helium MFC set to  0.000000
11/13/2010	10:05:41 PM	H2 MFC set to  0.000000
11/13/2010	10:05:41 PM	BCl3 MFC set to  0.000000
11/13/2010	10:05:41 PM	PHl3 MFC set to  0.000000
11/13/2010	10:05:41 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:05:41 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:05:41 PM	Tube furnace set to 0
11/13/2010	10:05:41 PM	Run finished at 10:05 PM
11/13/2010	10:05:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	10:05:45 PM	Recipe started at 10:05 PM
11/13/2010	10:05:45 PM	H2 valve closed
11/13/2010	10:05:45 PM	BCl3 valve closed
11/13/2010	10:05:45 PM	PH3 valve closed
11/13/2010	10:05:45 PM	SiCl4 pre valve closed
11/13/2010	10:05:45 PM	SiCl4 post valve closed
11/13/2010	10:05:45 PM	Main Vac valve closed
11/13/2010	10:05:45 PM	Bypass valve closed
11/13/2010	10:05:45 PM	Bubbler valve closed
11/13/2010	10:05:45 PM	Helium valve opened
11/13/2010	10:05:45 PM	Helium MFC set to  500.000000
11/13/2010	10:05:45 PM	H2 MFC set to  0.000000
11/13/2010	10:05:45 PM	BCl3 MFC set to  0.000000
11/13/2010	10:05:45 PM	PHl3 MFC set to  0.000000
11/13/2010	10:05:45 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:05:45 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:05:45 PM	Tube furnace set to 0
11/13/2010	10:05:46 PM	Helium valve closed
11/13/2010	10:05:46 PM	H2 valve closed
11/13/2010	10:05:46 PM	BCl3 valve closed
11/13/2010	10:05:46 PM	PH3 valve closed
11/13/2010	10:05:46 PM	SiCl4 pre valve closed
11/13/2010	10:05:46 PM	SiCl4 post valve closed
11/13/2010	10:05:46 PM	Main Vac valve closed
11/13/2010	10:05:46 PM	Bypass valve closed
11/13/2010	10:05:46 PM	Bubbler valve closed
11/13/2010	10:05:46 PM	Helium MFC set to  0.000000
11/13/2010	10:05:46 PM	H2 MFC set to  0.000000
11/13/2010	10:05:46 PM	BCl3 MFC set to  0.000000
11/13/2010	10:05:46 PM	PHl3 MFC set to  0.000000
11/13/2010	10:05:46 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:05:46 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:05:46 PM	Tube furnace set to 0
11/13/2010	10:05:46 PM	Run finished at 10:05 PM
11/13/2010	10:05:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	10:05:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	10:05:48 PM	Recipe started at 10:05 PM
11/13/2010	10:05:48 PM	H2 valve closed
11/13/2010	10:05:48 PM	BCl3 valve closed
11/13/2010	10:05:48 PM	PH3 valve closed
11/13/2010	10:05:48 PM	SiCl4 pre valve closed
11/13/2010	10:05:48 PM	SiCl4 post valve closed
11/13/2010	10:05:48 PM	Main Vac valve closed
11/13/2010	10:05:48 PM	Bypass valve closed
11/13/2010	10:05:48 PM	Bubbler valve closed
11/13/2010	10:05:48 PM	Helium valve opened
11/13/2010	10:05:48 PM	Helium MFC set to  500.000000
11/13/2010	10:05:48 PM	H2 MFC set to  0.000000
11/13/2010	10:05:48 PM	BCl3 MFC set to  0.000000
11/13/2010	10:05:48 PM	PHl3 MFC set to  0.000000
11/13/2010	10:05:48 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:05:48 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:05:49 PM	Tube furnace set to 0
11/13/2010	10:05:49 PM	Helium valve closed
11/13/2010	10:05:49 PM	H2 valve closed
11/13/2010	10:05:49 PM	BCl3 valve closed
11/13/2010	10:05:49 PM	PH3 valve closed
11/13/2010	10:05:49 PM	SiCl4 pre valve closed
11/13/2010	10:05:49 PM	SiCl4 post valve closed
11/13/2010	10:05:49 PM	Main Vac valve closed
11/13/2010	10:05:49 PM	Bypass valve closed
11/13/2010	10:05:49 PM	Bubbler valve closed
11/13/2010	10:05:49 PM	Helium MFC set to  0.000000
11/13/2010	10:05:49 PM	H2 MFC set to  0.000000
11/13/2010	10:05:49 PM	BCl3 MFC set to  0.000000
11/13/2010	10:05:49 PM	PHl3 MFC set to  0.000000
11/13/2010	10:05:49 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:05:49 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:05:49 PM	Tube furnace set to 0
11/13/2010	10:05:49 PM	Run finished at 10:05 PM
11/13/2010	10:05:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	10:11:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	10:11:32 PM	Recipe started at 10:11 PM
11/13/2010	10:11:32 PM	Helium valve closed
11/13/2010	10:11:32 PM	H2 valve closed
11/13/2010	10:11:32 PM	BCl3 valve closed
11/13/2010	10:11:32 PM	PH3 valve closed
11/13/2010	10:11:32 PM	SiCl4 pre valve closed
11/13/2010	10:11:32 PM	SiCl4 post valve closed
11/13/2010	10:11:32 PM	Main Vac valve closed
11/13/2010	10:11:32 PM	Bubbler valve closed
11/13/2010	10:11:32 PM	Bypass valve opened
11/13/2010	10:11:32 PM	Helium MFC set to  0.000000
11/13/2010	10:11:32 PM	H2 MFC set to  0.000000
11/13/2010	10:11:32 PM	BCl3 MFC set to  0.000000
11/13/2010	10:11:32 PM	PHl3 MFC set to  0.000000
11/13/2010	10:11:32 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:11:32 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:11:32 PM	Tube furnace set to 0
11/13/2010	10:12:26 PM	Helium valve closed
11/13/2010	10:12:26 PM	H2 valve closed
11/13/2010	10:12:26 PM	BCl3 valve closed
11/13/2010	10:12:26 PM	PH3 valve closed
11/13/2010	10:12:26 PM	SiCl4 pre valve closed
11/13/2010	10:12:26 PM	SiCl4 post valve closed
11/13/2010	10:12:26 PM	Bubbler valve closed
11/13/2010	10:12:26 PM	Main Vac valve opened
11/13/2010	10:12:26 PM	Bypass valve opened
11/13/2010	10:12:26 PM	Helium MFC set to  0.000000
11/13/2010	10:12:26 PM	H2 MFC set to  0.000000
11/13/2010	10:12:26 PM	BCl3 MFC set to  0.000000
11/13/2010	10:12:26 PM	PHl3 MFC set to  0.000000
11/13/2010	10:12:26 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:12:26 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:12:26 PM	Tube furnace set to 0
11/13/2010	10:12:27 PM	Run finished at 10:12 PM
11/13/2010	10:12:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	10:12:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	10:12:56 PM	Recipe started at 10:12 PM
11/13/2010	10:12:56 PM	H2 valve closed
11/13/2010	10:12:56 PM	BCl3 valve closed
11/13/2010	10:12:56 PM	PH3 valve closed
11/13/2010	10:12:56 PM	SiCl4 pre valve closed
11/13/2010	10:12:56 PM	SiCl4 post valve closed
11/13/2010	10:12:56 PM	Main Vac valve closed
11/13/2010	10:12:56 PM	Bypass valve closed
11/13/2010	10:12:56 PM	Bubbler valve closed
11/13/2010	10:12:56 PM	Helium valve opened
11/13/2010	10:12:56 PM	Helium MFC set to  500.000000
11/13/2010	10:12:56 PM	H2 MFC set to  0.000000
11/13/2010	10:12:56 PM	BCl3 MFC set to  0.000000
11/13/2010	10:12:56 PM	PHl3 MFC set to  0.000000
11/13/2010	10:12:56 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:12:56 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:12:56 PM	Tube furnace set to 0
11/13/2010	10:14:13 PM	Helium valve closed
11/13/2010	10:14:13 PM	H2 valve closed
11/13/2010	10:14:13 PM	BCl3 valve closed
11/13/2010	10:14:13 PM	PH3 valve closed
11/13/2010	10:14:13 PM	SiCl4 pre valve closed
11/13/2010	10:14:13 PM	SiCl4 post valve closed
11/13/2010	10:14:13 PM	Main Vac valve closed
11/13/2010	10:14:13 PM	Bypass valve closed
11/13/2010	10:14:13 PM	Bubbler valve closed
11/13/2010	10:14:13 PM	Helium MFC set to  0.000000
11/13/2010	10:14:13 PM	H2 MFC set to  0.000000
11/13/2010	10:14:13 PM	BCl3 MFC set to  0.000000
11/13/2010	10:14:13 PM	PHl3 MFC set to  0.000000
11/13/2010	10:14:13 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:14:13 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:14:14 PM	Tube furnace set to 0
11/13/2010	10:14:14 PM	Run finished at 10:14 PM
11/13/2010	10:14:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2010	10:14:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	10:14:19 PM	Recipe started at 10:14 PM
11/13/2010	10:14:19 PM	Helium valve closed
11/13/2010	10:14:19 PM	H2 valve closed
11/13/2010	10:14:19 PM	BCl3 valve closed
11/13/2010	10:14:19 PM	PH3 valve closed
11/13/2010	10:14:19 PM	SiCl4 pre valve closed
11/13/2010	10:14:19 PM	SiCl4 post valve closed
11/13/2010	10:14:19 PM	Main Vac valve closed
11/13/2010	10:14:19 PM	Bubbler valve closed
11/13/2010	10:14:19 PM	Bypass valve opened
11/13/2010	10:14:19 PM	Helium MFC set to  0.000000
11/13/2010	10:14:19 PM	H2 MFC set to  0.000000
11/13/2010	10:14:19 PM	BCl3 MFC set to  0.000000
11/13/2010	10:14:19 PM	PHl3 MFC set to  0.000000
11/13/2010	10:14:19 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:14:19 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:14:20 PM	Tube furnace set to 0
11/13/2010	10:14:55 PM	Helium valve closed
11/13/2010	10:14:55 PM	H2 valve closed
11/13/2010	10:14:55 PM	BCl3 valve closed
11/13/2010	10:14:55 PM	PH3 valve closed
11/13/2010	10:14:55 PM	SiCl4 pre valve closed
11/13/2010	10:14:55 PM	SiCl4 post valve closed
11/13/2010	10:14:55 PM	Bubbler valve closed
11/13/2010	10:14:55 PM	Main Vac valve opened
11/13/2010	10:14:55 PM	Bypass valve opened
11/13/2010	10:14:55 PM	Helium MFC set to  0.000000
11/13/2010	10:14:55 PM	H2 MFC set to  0.000000
11/13/2010	10:14:55 PM	BCl3 MFC set to  0.000000
11/13/2010	10:14:55 PM	PHl3 MFC set to  0.000000
11/13/2010	10:14:55 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:14:55 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:14:55 PM	Tube furnace set to 0
11/13/2010	10:14:56 PM	Run finished at 10:14 PM
11/13/2010	10:14:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2010	10:15:08 PM	Helium MFC set to  100.000000
11/13/2010	10:15:10 PM	Helium valve opened
11/13/2010	10:19:08 PM	Helium valve closed
11/13/2010	10:19:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/13/2010	10:19:50 PM	Recipe started at 10:19 PM
11/13/2010	10:19:50 PM	Helium valve closed
11/13/2010	10:19:50 PM	H2 valve closed
11/13/2010	10:19:50 PM	BCl3 valve closed
11/13/2010	10:19:50 PM	PH3 valve closed
11/13/2010	10:19:50 PM	SiCl4 pre valve closed
11/13/2010	10:19:50 PM	SiCl4 post valve closed
11/13/2010	10:19:50 PM	Main Vac valve closed
11/13/2010	10:19:50 PM	Bubbler valve closed
11/13/2010	10:19:50 PM	Bypass valve opened
11/13/2010	10:19:50 PM	Helium MFC set to  0.000000
11/13/2010	10:19:50 PM	H2 MFC set to  0.000000
11/13/2010	10:19:50 PM	BCl3 MFC set to  0.000000
11/13/2010	10:19:50 PM	PHl3 MFC set to  0.000000
11/13/2010	10:19:50 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:19:50 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:19:50 PM	Tube furnace set to 0
11/13/2010	10:19:51 PM	Helium valve closed
11/13/2010	10:19:51 PM	H2 valve closed
11/13/2010	10:19:51 PM	BCl3 valve closed
11/13/2010	10:19:51 PM	PH3 valve closed
11/13/2010	10:19:51 PM	SiCl4 pre valve closed
11/13/2010	10:19:51 PM	SiCl4 post valve closed
11/13/2010	10:19:51 PM	Bubbler valve closed
11/13/2010	10:19:51 PM	Main Vac valve opened
11/13/2010	10:19:51 PM	Bypass valve opened
11/13/2010	10:19:51 PM	Helium MFC set to  0.000000
11/13/2010	10:19:51 PM	H2 MFC set to  0.000000
11/13/2010	10:19:51 PM	BCl3 MFC set to  0.000000
11/13/2010	10:19:51 PM	PHl3 MFC set to  0.000000
11/13/2010	10:19:51 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:19:51 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:19:51 PM	Tube furnace set to 0
11/13/2010	10:20:51 PM	H2 valve closed
11/13/2010	10:20:51 PM	BCl3 valve closed
11/13/2010	10:20:51 PM	PH3 valve closed
11/13/2010	10:20:51 PM	SiCl4 pre valve closed
11/13/2010	10:20:51 PM	SiCl4 post valve closed
11/13/2010	10:20:51 PM	Bubbler valve closed
11/13/2010	10:20:51 PM	Helium valve opened
11/13/2010	10:20:51 PM	Main Vac valve opened
11/13/2010	10:20:51 PM	Bypass valve opened
11/13/2010	10:20:51 PM	Helium MFC set to  100.000000
11/13/2010	10:20:51 PM	H2 MFC set to  0.000000
11/13/2010	10:20:51 PM	BCl3 MFC set to  0.000000
11/13/2010	10:20:51 PM	PHl3 MFC set to  0.000000
11/13/2010	10:20:51 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:20:51 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:20:51 PM	Tube furnace set to 0
11/13/2010	10:21:51 PM	Helium valve closed
11/13/2010	10:21:51 PM	H2 valve closed
11/13/2010	10:21:51 PM	BCl3 valve closed
11/13/2010	10:21:51 PM	PH3 valve closed
11/13/2010	10:21:51 PM	SiCl4 pre valve closed
11/13/2010	10:21:51 PM	SiCl4 post valve closed
11/13/2010	10:21:51 PM	Bubbler valve closed
11/13/2010	10:21:51 PM	Main Vac valve opened
11/13/2010	10:21:51 PM	Bypass valve opened
11/13/2010	10:21:51 PM	Helium MFC set to  0.000000
11/13/2010	10:21:51 PM	H2 MFC set to  0.000000
11/13/2010	10:21:51 PM	BCl3 MFC set to  0.000000
11/13/2010	10:21:51 PM	PHl3 MFC set to  0.000000
11/13/2010	10:21:51 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:21:51 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:21:51 PM	Tube furnace set to 0
11/13/2010	10:22:51 PM	H2 valve closed
11/13/2010	10:22:51 PM	BCl3 valve closed
11/13/2010	10:22:51 PM	PH3 valve closed
11/13/2010	10:22:51 PM	SiCl4 pre valve closed
11/13/2010	10:22:51 PM	SiCl4 post valve closed
11/13/2010	10:22:51 PM	Bubbler valve closed
11/13/2010	10:22:51 PM	Helium valve opened
11/13/2010	10:22:51 PM	Main Vac valve opened
11/13/2010	10:22:51 PM	Bypass valve opened
11/13/2010	10:22:51 PM	Helium MFC set to  100.000000
11/13/2010	10:22:51 PM	H2 MFC set to  0.000000
11/13/2010	10:22:51 PM	BCl3 MFC set to  0.000000
11/13/2010	10:22:51 PM	PHl3 MFC set to  0.000000
11/13/2010	10:22:51 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:22:51 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:22:51 PM	Tube furnace set to 0
11/13/2010	10:23:51 PM	Helium valve closed
11/13/2010	10:23:51 PM	H2 valve closed
11/13/2010	10:23:51 PM	BCl3 valve closed
11/13/2010	10:23:51 PM	PH3 valve closed
11/13/2010	10:23:51 PM	SiCl4 pre valve closed
11/13/2010	10:23:51 PM	SiCl4 post valve closed
11/13/2010	10:23:51 PM	Bubbler valve closed
11/13/2010	10:23:51 PM	Main Vac valve opened
11/13/2010	10:23:51 PM	Bypass valve opened
11/13/2010	10:23:51 PM	Helium MFC set to  0.000000
11/13/2010	10:23:51 PM	H2 MFC set to  0.000000
11/13/2010	10:23:51 PM	BCl3 MFC set to  0.000000
11/13/2010	10:23:51 PM	PHl3 MFC set to  0.000000
11/13/2010	10:23:51 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:23:51 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:23:52 PM	Tube furnace set to 0
11/13/2010	10:24:52 PM	H2 valve closed
11/13/2010	10:24:52 PM	BCl3 valve closed
11/13/2010	10:24:52 PM	PH3 valve closed
11/13/2010	10:24:52 PM	SiCl4 pre valve closed
11/13/2010	10:24:52 PM	SiCl4 post valve closed
11/13/2010	10:24:52 PM	Bubbler valve closed
11/13/2010	10:24:52 PM	Helium valve opened
11/13/2010	10:24:52 PM	Main Vac valve opened
11/13/2010	10:24:52 PM	Bypass valve opened
11/13/2010	10:24:52 PM	Helium MFC set to  100.000000
11/13/2010	10:24:52 PM	H2 MFC set to  0.000000
11/13/2010	10:24:52 PM	BCl3 MFC set to  0.000000
11/13/2010	10:24:52 PM	PHl3 MFC set to  0.000000
11/13/2010	10:24:52 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:24:52 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:24:52 PM	Tube furnace set to 0
11/13/2010	10:25:52 PM	Helium valve closed
11/13/2010	10:25:52 PM	H2 valve closed
11/13/2010	10:25:52 PM	BCl3 valve closed
11/13/2010	10:25:52 PM	PH3 valve closed
11/13/2010	10:25:52 PM	SiCl4 pre valve closed
11/13/2010	10:25:52 PM	SiCl4 post valve closed
11/13/2010	10:25:52 PM	Bubbler valve closed
11/13/2010	10:25:52 PM	Main Vac valve opened
11/13/2010	10:25:52 PM	Bypass valve opened
11/13/2010	10:25:52 PM	Helium MFC set to  0.000000
11/13/2010	10:25:52 PM	H2 MFC set to  0.000000
11/13/2010	10:25:52 PM	BCl3 MFC set to  0.000000
11/13/2010	10:25:52 PM	PHl3 MFC set to  0.000000
11/13/2010	10:25:52 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:25:52 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:25:52 PM	Tube furnace set to 0
11/13/2010	10:26:52 PM	H2 valve closed
11/13/2010	10:26:52 PM	BCl3 valve closed
11/13/2010	10:26:52 PM	PH3 valve closed
11/13/2010	10:26:52 PM	SiCl4 pre valve closed
11/13/2010	10:26:52 PM	SiCl4 post valve closed
11/13/2010	10:26:52 PM	Bubbler valve closed
11/13/2010	10:26:52 PM	Helium valve opened
11/13/2010	10:26:52 PM	Main Vac valve opened
11/13/2010	10:26:52 PM	Bypass valve opened
11/13/2010	10:26:52 PM	Helium MFC set to  100.000000
11/13/2010	10:26:52 PM	H2 MFC set to  0.000000
11/13/2010	10:26:52 PM	BCl3 MFC set to  0.000000
11/13/2010	10:26:52 PM	PHl3 MFC set to  0.000000
11/13/2010	10:26:52 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:26:52 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:26:52 PM	Tube furnace set to 0
11/13/2010	10:27:52 PM	Helium valve closed
11/13/2010	10:27:52 PM	H2 valve closed
11/13/2010	10:27:52 PM	BCl3 valve closed
11/13/2010	10:27:52 PM	PH3 valve closed
11/13/2010	10:27:52 PM	SiCl4 pre valve closed
11/13/2010	10:27:52 PM	SiCl4 post valve closed
11/13/2010	10:27:52 PM	Bubbler valve closed
11/13/2010	10:27:52 PM	Main Vac valve opened
11/13/2010	10:27:52 PM	Bypass valve opened
11/13/2010	10:27:52 PM	Helium MFC set to  0.000000
11/13/2010	10:27:52 PM	H2 MFC set to  0.000000
11/13/2010	10:27:52 PM	BCl3 MFC set to  0.000000
11/13/2010	10:27:52 PM	PHl3 MFC set to  0.000000
11/13/2010	10:27:52 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:27:52 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:27:52 PM	Tube furnace set to 0
11/13/2010	10:28:52 PM	H2 valve closed
11/13/2010	10:28:52 PM	BCl3 valve closed
11/13/2010	10:28:52 PM	PH3 valve closed
11/13/2010	10:28:52 PM	SiCl4 pre valve closed
11/13/2010	10:28:52 PM	SiCl4 post valve closed
11/13/2010	10:28:52 PM	Bubbler valve closed
11/13/2010	10:28:52 PM	Helium valve opened
11/13/2010	10:28:52 PM	Main Vac valve opened
11/13/2010	10:28:52 PM	Bypass valve opened
11/13/2010	10:28:52 PM	Helium MFC set to  100.000000
11/13/2010	10:28:52 PM	H2 MFC set to  0.000000
11/13/2010	10:28:52 PM	BCl3 MFC set to  0.000000
11/13/2010	10:28:52 PM	PHl3 MFC set to  0.000000
11/13/2010	10:28:52 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:28:52 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:28:53 PM	Tube furnace set to 0
11/13/2010	10:29:53 PM	Helium valve closed
11/13/2010	10:29:53 PM	H2 valve closed
11/13/2010	10:29:53 PM	BCl3 valve closed
11/13/2010	10:29:53 PM	PH3 valve closed
11/13/2010	10:29:53 PM	SiCl4 pre valve closed
11/13/2010	10:29:53 PM	SiCl4 post valve closed
11/13/2010	10:29:53 PM	Bubbler valve closed
11/13/2010	10:29:53 PM	Main Vac valve opened
11/13/2010	10:29:53 PM	Bypass valve opened
11/13/2010	10:29:53 PM	Helium MFC set to  0.000000
11/13/2010	10:29:53 PM	H2 MFC set to  0.000000
11/13/2010	10:29:53 PM	BCl3 MFC set to  0.000000
11/13/2010	10:29:53 PM	PHl3 MFC set to  0.000000
11/13/2010	10:29:53 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:29:53 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:29:53 PM	Tube furnace set to 0
11/13/2010	10:30:53 PM	H2 valve closed
11/13/2010	10:30:53 PM	BCl3 valve closed
11/13/2010	10:30:53 PM	PH3 valve closed
11/13/2010	10:30:53 PM	SiCl4 pre valve closed
11/13/2010	10:30:53 PM	SiCl4 post valve closed
11/13/2010	10:30:53 PM	Bubbler valve closed
11/13/2010	10:30:53 PM	Helium valve opened
11/13/2010	10:30:53 PM	Main Vac valve opened
11/13/2010	10:30:53 PM	Bypass valve opened
11/13/2010	10:30:53 PM	Helium MFC set to  100.000000
11/13/2010	10:30:53 PM	H2 MFC set to  0.000000
11/13/2010	10:30:53 PM	BCl3 MFC set to  0.000000
11/13/2010	10:30:53 PM	PHl3 MFC set to  0.000000
11/13/2010	10:30:53 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:30:53 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:30:53 PM	Tube furnace set to 0
11/13/2010	10:31:53 PM	Helium valve closed
11/13/2010	10:31:53 PM	H2 valve closed
11/13/2010	10:31:53 PM	BCl3 valve closed
11/13/2010	10:31:53 PM	PH3 valve closed
11/13/2010	10:31:53 PM	SiCl4 pre valve closed
11/13/2010	10:31:53 PM	SiCl4 post valve closed
11/13/2010	10:31:53 PM	Bubbler valve closed
11/13/2010	10:31:53 PM	Main Vac valve opened
11/13/2010	10:31:53 PM	Bypass valve opened
11/13/2010	10:31:53 PM	Helium MFC set to  0.000000
11/13/2010	10:31:53 PM	H2 MFC set to  0.000000
11/13/2010	10:31:53 PM	BCl3 MFC set to  0.000000
11/13/2010	10:31:53 PM	PHl3 MFC set to  0.000000
11/13/2010	10:31:53 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:31:53 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:31:53 PM	Tube furnace set to 0
11/13/2010	10:32:53 PM	H2 valve closed
11/13/2010	10:32:53 PM	BCl3 valve closed
11/13/2010	10:32:53 PM	PH3 valve closed
11/13/2010	10:32:53 PM	SiCl4 pre valve closed
11/13/2010	10:32:53 PM	SiCl4 post valve closed
11/13/2010	10:32:53 PM	Bubbler valve closed
11/13/2010	10:32:53 PM	Helium valve opened
11/13/2010	10:32:53 PM	Main Vac valve opened
11/13/2010	10:32:53 PM	Bypass valve opened
11/13/2010	10:32:53 PM	Helium MFC set to  100.000000
11/13/2010	10:32:53 PM	H2 MFC set to  0.000000
11/13/2010	10:32:53 PM	BCl3 MFC set to  0.000000
11/13/2010	10:32:53 PM	PHl3 MFC set to  0.000000
11/13/2010	10:32:53 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:32:53 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:32:53 PM	Tube furnace set to 0
11/13/2010	10:33:53 PM	Helium valve closed
11/13/2010	10:33:53 PM	H2 valve closed
11/13/2010	10:33:53 PM	BCl3 valve closed
11/13/2010	10:33:53 PM	PH3 valve closed
11/13/2010	10:33:53 PM	SiCl4 pre valve closed
11/13/2010	10:33:53 PM	SiCl4 post valve closed
11/13/2010	10:33:53 PM	Bubbler valve closed
11/13/2010	10:33:53 PM	Main Vac valve opened
11/13/2010	10:33:53 PM	Bypass valve opened
11/13/2010	10:33:53 PM	Helium MFC set to  0.000000
11/13/2010	10:33:53 PM	H2 MFC set to  0.000000
11/13/2010	10:33:53 PM	BCl3 MFC set to  0.000000
11/13/2010	10:33:53 PM	PHl3 MFC set to  0.000000
11/13/2010	10:33:53 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:33:53 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:33:54 PM	Tube furnace set to 0
11/13/2010	10:34:54 PM	H2 valve closed
11/13/2010	10:34:54 PM	BCl3 valve closed
11/13/2010	10:34:54 PM	PH3 valve closed
11/13/2010	10:34:54 PM	SiCl4 pre valve closed
11/13/2010	10:34:54 PM	SiCl4 post valve closed
11/13/2010	10:34:54 PM	Bubbler valve closed
11/13/2010	10:34:54 PM	Helium valve opened
11/13/2010	10:34:54 PM	Main Vac valve opened
11/13/2010	10:34:54 PM	Bypass valve opened
11/13/2010	10:34:54 PM	Helium MFC set to  100.000000
11/13/2010	10:34:54 PM	H2 MFC set to  0.000000
11/13/2010	10:34:54 PM	BCl3 MFC set to  0.000000
11/13/2010	10:34:54 PM	PHl3 MFC set to  0.000000
11/13/2010	10:34:54 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:34:54 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:34:54 PM	Tube furnace set to 0
11/13/2010	10:35:54 PM	Helium valve closed
11/13/2010	10:35:54 PM	H2 valve closed
11/13/2010	10:35:54 PM	BCl3 valve closed
11/13/2010	10:35:54 PM	PH3 valve closed
11/13/2010	10:35:54 PM	SiCl4 pre valve closed
11/13/2010	10:35:54 PM	SiCl4 post valve closed
11/13/2010	10:35:54 PM	Bubbler valve closed
11/13/2010	10:35:54 PM	Main Vac valve opened
11/13/2010	10:35:54 PM	Bypass valve opened
11/13/2010	10:35:54 PM	Helium MFC set to  0.000000
11/13/2010	10:35:54 PM	H2 MFC set to  0.000000
11/13/2010	10:35:54 PM	BCl3 MFC set to  0.000000
11/13/2010	10:35:54 PM	PHl3 MFC set to  0.000000
11/13/2010	10:35:54 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:35:54 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:35:54 PM	Tube furnace set to 0
11/13/2010	10:36:54 PM	H2 valve closed
11/13/2010	10:36:54 PM	BCl3 valve closed
11/13/2010	10:36:54 PM	PH3 valve closed
11/13/2010	10:36:54 PM	SiCl4 pre valve closed
11/13/2010	10:36:54 PM	SiCl4 post valve closed
11/13/2010	10:36:54 PM	Bubbler valve closed
11/13/2010	10:36:54 PM	Helium valve opened
11/13/2010	10:36:54 PM	Main Vac valve opened
11/13/2010	10:36:54 PM	Bypass valve opened
11/13/2010	10:36:54 PM	Helium MFC set to  100.000000
11/13/2010	10:36:54 PM	H2 MFC set to  0.000000
11/13/2010	10:36:54 PM	BCl3 MFC set to  0.000000
11/13/2010	10:36:54 PM	PHl3 MFC set to  0.000000
11/13/2010	10:36:54 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:36:54 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:36:54 PM	Tube furnace set to 0
11/13/2010	10:37:54 PM	Helium valve closed
11/13/2010	10:37:54 PM	H2 valve closed
11/13/2010	10:37:54 PM	BCl3 valve closed
11/13/2010	10:37:54 PM	PH3 valve closed
11/13/2010	10:37:54 PM	SiCl4 pre valve closed
11/13/2010	10:37:54 PM	SiCl4 post valve closed
11/13/2010	10:37:54 PM	Bubbler valve closed
11/13/2010	10:37:54 PM	Main Vac valve opened
11/13/2010	10:37:54 PM	Bypass valve opened
11/13/2010	10:37:54 PM	Helium MFC set to  0.000000
11/13/2010	10:37:54 PM	H2 MFC set to  0.000000
11/13/2010	10:37:54 PM	BCl3 MFC set to  0.000000
11/13/2010	10:37:54 PM	PHl3 MFC set to  0.000000
11/13/2010	10:37:54 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:37:54 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:37:54 PM	Tube furnace set to 0
11/13/2010	10:38:54 PM	H2 valve closed
11/13/2010	10:38:54 PM	BCl3 valve closed
11/13/2010	10:38:54 PM	PH3 valve closed
11/13/2010	10:38:54 PM	SiCl4 pre valve closed
11/13/2010	10:38:54 PM	SiCl4 post valve closed
11/13/2010	10:38:54 PM	Bubbler valve closed
11/13/2010	10:38:54 PM	Helium valve opened
11/13/2010	10:38:54 PM	Main Vac valve opened
11/13/2010	10:38:54 PM	Bypass valve opened
11/13/2010	10:38:54 PM	Helium MFC set to  100.000000
11/13/2010	10:38:54 PM	H2 MFC set to  0.000000
11/13/2010	10:38:54 PM	BCl3 MFC set to  0.000000
11/13/2010	10:38:54 PM	PHl3 MFC set to  0.000000
11/13/2010	10:38:54 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:38:54 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:38:55 PM	Tube furnace set to 0
11/13/2010	10:39:55 PM	Helium valve closed
11/13/2010	10:39:55 PM	H2 valve closed
11/13/2010	10:39:55 PM	BCl3 valve closed
11/13/2010	10:39:55 PM	PH3 valve closed
11/13/2010	10:39:55 PM	SiCl4 pre valve closed
11/13/2010	10:39:55 PM	SiCl4 post valve closed
11/13/2010	10:39:55 PM	Bubbler valve closed
11/13/2010	10:39:55 PM	Main Vac valve opened
11/13/2010	10:39:55 PM	Bypass valve opened
11/13/2010	10:39:55 PM	Helium MFC set to  0.000000
11/13/2010	10:39:55 PM	H2 MFC set to  0.000000
11/13/2010	10:39:55 PM	BCl3 MFC set to  0.000000
11/13/2010	10:39:55 PM	PHl3 MFC set to  0.000000
11/13/2010	10:39:55 PM	SiCl4 MFC set to  0.000000
11/13/2010	10:39:55 PM	Bypass solenoid MFC set to  0.000000
11/13/2010	10:39:55 PM	Tube furnace set to 0
11/13/2010	10:39:56 PM	Run finished at 10:39 PM
11/13/2010	10:39:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
